Skip to main content
SpringerLink
Log in

Influence of the Thermal Conditions of Fabrication and Treatment on the Optical Properties of In2O3 Films

  • Surfaces, Interfaces, and Thin Films
  • Published:
Semiconductors Aims and scope Submit manuscript

Abstract

In2O3 films on Al2O3 (012) substrates are fabricated by dc magnetron sputtering at various temperatures (20–600°C). The effect of annealing and the substrate temperature on the film properties are studied by the ellipsometric method and the optical transmission method. Refractive-index profiles are constructed and band gaps for direct and indirect transitions are found. It is established that annealing leads to densification of the film material and unifies the refractive index. Annealing also decreases and unifies the energies of band-to-band transitions, which can be explained by lowering the influence of barriers in annealed films. However, the band gap for direct transitions varies greater than for indirect transitions. This fact can be associated with the mechanism of indirect transitions, notably, the participation of phonons facilitates interband transitions even if they are hindered by extra barriers caused by grain boundaries. The latter can be indirect evidence of the actuality of indirect transitions in indium oxide.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Yu. M. Nikolaenko, A. B. Mukhin, V. A. Chaika, and V. V. Burkhovetskii, Tech. Phys. 55, 1189 (2010).

    Article  Google Scholar 

  2. A. A. Tikhii, V. A. Gritskikh, S. V. Kara-Murza, Yu. M. Nikolaenko, and I. V. Zhikharev, Opt. Spectrosc. 112, 300 (2012).

    Article  ADS  Google Scholar 

  3. A. A. Tikhii, V. A. Gritskikh, S. V. Kara-Murza, N. V. Korchikova, Yu. M. Nikolaenko, V. V. Faraponov, and I. V. Zhikharev, Opt. Spectrosc. 119, 268 (2015).

    Article  ADS  Google Scholar 

  4. P. Erhart, A. Klean, R. G. Egdell, and K. Albe, Phys. Rev. B 75, 153205 (2007).

    Article  ADS  Google Scholar 

  5. A. Klein, Appl. Phys. Lett. 77, 2009 (2000).

    Article  ADS  Google Scholar 

  6. Y. Gassenbauer, R. Schafranek, A. Klein, S. Zafeiratos, M. Hävecker, A. Knop-Gericke, and R. Schlögl, Phys. Rev. B 73, 245312 (2006).

    Article  ADS  Google Scholar 

  7. Handbook of Chemistry and Physics, Ed. by D. R. Lide, 85th ed. (CRC, Boca Raton, FL, 2004).

  8. Y. Gassenbauer, R. Schafranek, A. Klein, S. Zafeiratos, M. Hävecker, A. Knop-Gericke, and R. Schlögl, Phys. Rev. B 73, 245312 (2006).

    Article  ADS  Google Scholar 

  9. S. P. Harvey, T. O. Mason, Y. Gassenbauer, R. Schafranek, and A. Klein, J. Phys. D: Appl. Phys. 39, 3959 (2006).

    Article  Google Scholar 

  10. R. A. Pollak, S. Kowalczyk, L. Ley, and D. A. Shirley, Phys. Rev. Lett. 29, 274 (1972).

    Article  ADS  Google Scholar 

  11. T. Kendelewicz, P. H. Mahowald, K. A. Bertness, C. E. McCants, I. Lindau, and W. E. Spicer, Phys. Rev. B 36, 6543 (1987).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Donetsk Institute for Physics and Engineering, Donetsk, 83114, Ukraine

    A. A. Tikhii, Yu. M. Nikolaenko, A. S. Kornievets & I. V. Zhikharev

  2. State University of Telecommunications, Kyiv, 03680, Ukraine

    Yu. I. Zhikhareva

Authors
  1. A. A. Tikhii
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yu. M. Nikolaenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yu. I. Zhikhareva
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. S. Kornievets
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. I. V. Zhikharev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. A. Tikhii.

Additional information

Original Russian Text © A.A. Tikhii, Yu.M. Nikolaenko, Yu.I. Zhikhareva, A.S. Kornievets, I.V. Zhikharev, 2018, published in Fizika i Tekhnika Poluprovodnikov, 2018, Vol. 52, No. 3, pp. 337–341.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tikhii, A.A., Nikolaenko, Y.M., Zhikhareva, Y.I. et al. Influence of the Thermal Conditions of Fabrication and Treatment on the Optical Properties of In2O3 Films. Semiconductors 52, 320–323 (2018). https://doi.org/10.1134/S1063782618030223

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063782618030223

Search

Navigation