Skip to main content
SpringerLink
Log in

Measurements of electrophysical characteristics of semiconductor structures with the use of microwave photonic crystals

  • Methods and Technique of Measurements
  • Published:
Semiconductors Aims and scope Submit manuscript

Abstract

A method is proposed for the measurement of the electrophysical characteristics of semiconductor structures: the electrical conductivity of the n layer, which plays the role of substrate for a semiconductor structure, and the thickness and electrical conductivity of the strongly doped epitaxial n + layer. The method is based on the use of a one-dimensional microwave photonic crystal with a violation of periodicity containing the semiconductor structure under investigation. The characteristics of epitaxial gallium-arsenide structures consisting of an epitaxial layer and the semi-insulating substrate measured by this method are presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. E. Yablonovitch, T. J. Gimitter, R. D. Meade, et al., Phys. Rev. Lett. 67, 3380 (1991).

    Article  ADS  Google Scholar 

  2. B. A. Belyaev, A. S. Voloshin, and V. F. Shabanov, Dokl. Phys. 50, 337 (2005).

    Article  ADS  Google Scholar 

  3. S. A. Nikitov, Yu. V. Gulyaev, D. A. Usanov, A. V. Skripal’, and D. V. Ponomarev, Dokl. Phys. 58, 6 (2013).

    Article  ADS  Google Scholar 

  4. D. A. Usanov, A. V. Skripal, D. V. Ponomarev, et al., in Proceedings of the 44th European Microwave Conference, Rome, Italy, Oct. 6–9, 2014 (2014), p.984.

    Google Scholar 

  5. D. Usanov, A. Skripal, D. Ponomarev, et al., in Proceedings of the 20th International Conference on Microwaves, Radar, and Wireless Communications MIKON-2014, Gdansk, Poland, June 16–18, 2014 (2014), Vol. 1, p.62.

    Google Scholar 

  6. D. A. Usanov, Microwave Methods of Semiconductor Parameters Measurement (Saratov. Gos. Univ., Saratov, 1985) [in Russian].

    Google Scholar 

  7. Yu. A. Chaplygin, D. A. Usanov, Al. V. Skripal’, et al., Izv. Vyssh. Uchebn. Zaved., Elektron., No. 1, 68 (2005).

    Google Scholar 

  8. D. A. Usanov, A. V. Skripal’, A. V. Abramov, and A. S. Bogolyubov, Tech. Phys. 51, 644 (2006).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Chernyshevsky National Research State University, Saratov, 410071, Russia

    D. A. Usanov, A. V. Skripal, D. V. Ponomarev & E. V. Latysheva

  2. Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Moscow, 103907, Russia

    S. A. Nikitov

Authors
  1. D. A. Usanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. A. Nikitov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Skripal
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. V. Ponomarev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. E. V. Latysheva
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. A. Usanov.

Additional information

Original Russian Text © D.A. Usanov, S.A. Nikitov, A.V. Skripal, D.V. Ponomarev, E.V. Latysheva, 2016, published in Izvestiya vysshikh uchebnykh zavedenii. Elektronika, 2016, Vol. 21, No. 2, pp. 187–194.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Usanov, D.A., Nikitov, S.A., Skripal, A.V. et al. Measurements of electrophysical characteristics of semiconductor structures with the use of microwave photonic crystals. Semiconductors 50, 1759–1763 (2016). https://doi.org/10.1134/S1063782616130091

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063782616130091

Keywords

Search

Navigation