Abstract
InGaN/(Al,Ga)N heterostructures containing ultrathin InGaN layers, grown by submonolayer deposition are studied. It is shown that significant phase separation with the formation of local In-enriched regions ∼3–4 nm in height and ∼5–8 nm in lateral size is observed in InGaN layers in the case of InGaN and GaN growth by cyclic deposition to effective thicknesses of less than one monolayer. The effect of growth interruption in a hydrogen-containing atmosphere during submonolayer growth on the structural and optical properties of InGaN/(Al,Ga)N heterostructures is studied. It is shown that these interruptions stimulate phase separation. It is also shown that the formation of In-enriched regions can be controlled by varying the effective InGaN and GaN thicknesses in the submonolayer deposition cycles.
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References
A. F. Tsatsul’nikov, B. V. Volovik, N. N. Ledentsov, M. V. Maximov, A. Yu. Egorov, A. R. Koush, et al., J. Electron. Mater. 28, 537 (1999).
A. E. Zhukov, A. R. Kovsh, S. S. Mikhrin, N. A. Maleev, V. M. Ustinov, D. A. Livshits, I. S. Tarasov, D. A. Bedarev, M. V. Maximov, A. F. Tsatsul’nikov, I. P. Soshnikov, P. S. Kop’ev, Zh. I. Alferov, N. N. Ledentsov, and D. Bimberg, Electron. Lett. 35, 1845 (1999).
K. P. O’Donnell, R. W. Martin, and P. G. Middleton, Phys. Rev. Lett. 82, 237 (1999).
Yu. G. Musikhin, D. Gerthsen, D. A. Bedarev, N. A. Bert, W. V. Lundin, A. F. Tsatsul’nikov, A. V. Sakharov, A. S. Usikov, Zh. I. Alferov, I. L. Krestnikov, N. N. Ledentsov, A. Hoffmann, and D. Bimberg, Appl. Phys. Lett. 8, 2099 (2002).
N. H. Karam, T. Parodos, P. Colter, D. McNulty, W. Rowland, J. Schetzina, N. El-Masry, and Salah M. Bedair, Appl. Phys. Lett. 67, 94 (1995).
S. Keller, U. K. Mishra, and S. P. Denbaars, J. Electron. Mater. 26, 1118 (1997).
A. E. Zhukov, V. M. Ustinov, A. R. Kovsh, A. Yu. Egorov, N. A. Maleev, N. N. Ledentsov, A. F. Tsatsul’nikov, M. V. Maximov, Yu. G. Musikhin, N. A. Bert, P. S. Kop’ev, D. Bimberg, and Zh. I. Alferov, Semicond. Sci. Technol. 14, 575 (1999).
V. V. Gontcharov, M. N. Korytov, P. N. Brunkov, V. V. Lundin, E. E. Zavarin, A. F. Tsatsul’nikov, and S. G. Konnikov, Bull. Russ. Acad. Sci.: Phys. 73, 36 (2009).
E. L. Piner, M. K. Behbehani, N. A. El-Masry, F. G. McIntosh, J. C. Roberts, K. S. Boutros, and S. M. Bedair, Appl. Phys. Lett. 70, 461 (1997).
Ta-Chuan Kuo, Wei-Jen Chen, Chih-Chun Ke, Cheng-Wei Hung, Hui-Tang Shen, Jen-Cheng Wang, Ya-Fen Wu, and Tzer-En Nee, Proc. SPIE 6473, 64730D (2007).
W. Liu, S. J. Chua, X. H. Zhang, and J. Zhang, Appl. Phys. Lett. 83, 914 (2003).
A. F. Tsatsul’nikov, V. V. Lundin, E. E. Zavarin, A. E. Nikolaev, A. V. Sakharov, V. S. Sizov, S. O. Usov, Yu. G. Musikhin, and D. Gerthsen, Phys. Techn. Poluprovodn. 44(6), 857 (2010).
N. V. Kryzhanovskaya, V. V. Lundin, A. E. Nikolaev, A. F. Tsatsul’nikov, A. V. Sakharov, M. M. Pavlov, N. A. Cherkashin, M. J. Hytch, G. A. Val’kovskii, M. A. Yagovkina, and S. O. Usov, Phys. Techn. Polupovodn. 45(2), 274 (2011).
M. J. Hytch, E. Snoeck, and R. Kilaas, Ultramicroscopy 74, 131 (1998).
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Original Russian Text © A.F. Tsatsulnikov, W.V. Lundin, E.E. Zavarin, A.V. Sakharov, Yu.G. Musikhin, S.O. Usov, M.N. Mizerov, N.A. Cherkashin, 2012, published in Fizika i Tekhnika Poluprovodnikov, 2012, Vol. 46, No. 10, pp. 1357–1362.
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Tsatsulnikov, A.F., Lundin, W.V., Zavarin, E.E. et al. InGaN/GaN heterostructures grown by submonolayer deposition. Semiconductors 46, 1335–1340 (2012). https://doi.org/10.1134/S106378261210017X
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DOI: https://doi.org/10.1134/S106378261210017X