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Effect of the temperature during deposition of AlO x films by spray pyrolysis on their passivating properties in a silicon solar cell

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Abstract

The effect of the deposition temperature of AlO x in the range 330–530°C by spray pyrolysis on the rear-surface parameters of silicon (n + pp +)Cz-Si/AlO x solar cells has been studied. It is found that, as the temperature of AlO x deposition is increased, all parameters of the rear surfaces decrease; e.g., the photocurrent density decreases from 25.4 to 24.1 mA/cm2; the photovoltage decreases from 611 to 598 mV; and the efficiency decreases from 12.2 to 10.9%. This indicates that passivation of the p +-type surface with AlO x films becomes less effective. It is concluded that, as the temperature of AlO x deposition is increased, the value of the positive charge incorporated into the nonstoichiometric interphase SiO x layer formed between c-Si and AlO x in the course of AlO x deposition, which brings about screening of the negative charge localized at the AlOx-SiOx interface and, respectively, a decrease in the field-induced passivation, increases.

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Authors and Affiliations

  1. Skobeltsyn Research Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia

    G. G. Untila, T. N. Kost & A. B. Chebotareva

  2. The OOO Solar Wind, Krasnodar, 350000, Russia

    M. B. Zaks, A. M. Sitnikov & O. I. Solodukha

Authors
  1. G. G. Untila
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  2. T. N. Kost
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  3. A. B. Chebotareva
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  4. M. B. Zaks
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  5. A. M. Sitnikov
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  6. O. I. Solodukha
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Correspondence to G. G. Untila.

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Original Russian Text © G.G. Untila, T.N. Kost, A.B. Chebotareva, M.B. Zaks, A.M. Sitnikov, O.I. Solodukha, 2012, published in Fizika i Tekhnika Poluprovodnikov, 2012, Vol. 46, No. 6, pp. 852–856.

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Untila, G.G., Kost, T.N., Chebotareva, A.B. et al. Effect of the temperature during deposition of AlO x films by spray pyrolysis on their passivating properties in a silicon solar cell. Semiconductors 46, 832–837 (2012). https://doi.org/10.1134/S1063782612060255

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  • DOI: https://doi.org/10.1134/S1063782612060255

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