Abstract
A method for the thermal oxidation of GaAs crystals in air is suggested and the first photosensitive Ox/n-GaAs heterojunctions, where Ox is a native oxide, are fabricated. The steady current-voltage characteristics and spectra of relative quantum efficiency of the new structures are studied. The features of the spectra of photoactive absorption of the obtained heterojunctions are discussed. The potential of using vacuumfree thermal oxidation of the GaAs crystals in air to fabricate broadband heterophotoconverters of optical radiation on their basis is established.
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Original Russian Text © V.Yu. Rud’, Yu.V. Rud’, E.I. Terukov, T.N. Ushakova, 2012, published in Fizika i Tekhnika Poluprovodnikov, 2012, Vol. 46, No. 6, pp. 802–804.
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Rud’, V.Y., Rud’, Y.V., Terukov, E.I. et al. Photosensitive Ox/GaAs heterojunctions: Creation and properties. Semiconductors 46, 783–785 (2012). https://doi.org/10.1134/S1063782612060164
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DOI: https://doi.org/10.1134/S1063782612060164