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Modification of electrical and optical properties of ZnO films under ultraviolet irradiation

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Abstract

The effect of ultraviolet radiation of polycrystalline zinc oxide films (with a thickness of 200 nm) on their resistivity, transparency, and luminescence in the visible and violet spectral regions is studied. It is shown that, under irradiation of the films in air and vacuum, the conductivity, transmittance, and edge luminescence intensity increase with characteristic times of about 100 min. It is established that the corresponding processes controlled by desorption of oxygen atoms and molecules from the surface of nanocrytals in the ZnO films are reversible.

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Authors and Affiliations

  1. Institute of Microelectronic Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    A. N. Gruzintsev & W. T. Volkov

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  1. A. N. Gruzintsev
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  2. W. T. Volkov
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Correspondence to A. N. Gruzintsev.

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Original Russian Text © A.N. Gruzintsev, W.T. Volkov, 2011, published in Fizika i Tekhnika Poluprovodnikov, 2011, Vol. 45, No. 11, pp. 1476–1480.

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Gruzintsev, A.N., Volkov, W.T. Modification of electrical and optical properties of ZnO films under ultraviolet irradiation. Semiconductors 45, 1420–1424 (2011). https://doi.org/10.1134/S1063782611110121

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  • DOI: https://doi.org/10.1134/S1063782611110121

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