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Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film

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Abstract

Experimental results on the conditions of activation of probe nanolithography of a thin titanium film by means of local anodic oxidation are reported. It is established that ultraviolet stimulation reduces the geometric dimensions of nanometric oxide structures. The stimulation is accompanied by an increase in the amplitude and duration of the threshold voltage pulse, correspondingly, from 6 to 7 V and from 50 to 100 ms at the relative humidity 50%. The experimental data on the effect of the cantilever coating material and substrate temperature on the geometric dimensions of nanometric oxide structures are reported.

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Authors and Affiliations

  1. Taganrog Institute of Technology, Southern Federal University, Taganrog, 347928, Russia

    O. A. Ageev, N. I. Alyab’eva, B. G. Konoplev, V. V. Polyakov & V. A. Smirnov

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  1. O. A. Ageev
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  2. N. I. Alyab’eva
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  3. B. G. Konoplev
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  4. V. V. Polyakov
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  5. V. A. Smirnov
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Corresponding author

Correspondence to B. G. Konoplev.

Additional information

Original Russian Text © O.A. Ageev, N.I. Alyab’eva, B.G. Konoplev, V.V. Polyakov, V.A. Smirnov, 2010, published in Izvestiya vysshikh uchebnykh zavedenii. Elektronika.

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Ageev, O.A., Alyab’eva, N.I., Konoplev, B.G. et al. Photoactivation of the processes of formation of nanostructures by local anodic oxidation of a titanium film. Semiconductors 44, 1703–1708 (2010). https://doi.org/10.1134/S1063782610130178

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  • DOI: https://doi.org/10.1134/S1063782610130178

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