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Reversible high-speed electrostatic “contact”

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Abstract

The specific features of the formation of a reversible contact in a structure composed of a mobile electrode and a high-permittivity ferroelectric under a voltage pulse have been investigated. It is shown that, using a ferroelectric film, one can form an anomalously high density of electric field energy (to 108 J/m3); a pressure up to 104 N/m2; and, correspondingly, adhesion forces for the two surfaces up to (3–5) × 105 N/J, depending on the energy capacity of the structure, in the air nanogap between these surfaces.

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Authors and Affiliations

  1. Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Koptug pr. 1, Novosibirsk, 630090, Russia

    I. L. Baginsky & E. G. Kostsov

Authors
  1. I. L. Baginsky
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  2. E. G. Kostsov
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Corresponding author

Correspondence to E. G. Kostsov.

Additional information

Original Russian Text © I.L. Baginsky, E.G. Kostsov, 2010, published in Izvestiya vysshikh uchebnykh zavedenii. Elektronika.

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Baginsky, I.L., Kostsov, E.G. Reversible high-speed electrostatic “contact”. Semiconductors 44, 1654–1657 (2010). https://doi.org/10.1134/S1063782610130075

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  • DOI: https://doi.org/10.1134/S1063782610130075

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