Abstract
The N-Al0.27Ga0.73N/GaN High Electron Mobility Transistors (HEMTs) with different gate lengths L g (ranging from 170 nm to 0.5 μm) and gate widths W s (ranging from 100 to 1200 μm) have been studied. The S parameters have been measured; these parameters have been used to determine the current-gain cutoff frequency f t , the maximum oscillation frequency f max, and the power gain MSG/MAG and Mason’s coefficients were investigated in the frequency range from 10 MHz to 67 GHz in relation to the gate length and gate width. It was found that the frequencies f t and f max attain their maximum values of f t = 48 GHz and f max = 100 GHz at L g = 170 nm and W g = 100 μm. The optimum values of W g and output power P out of the basic transistors have been determined for different frequencies of operation. It has also been demonstrated that the 170 nm Al0.27Ga0.73N/GaN HEMT technology provides both good frequency characteristics and high breakdown voltages and is very promising for high-frequency applications (up to 40 GHz).
Similar content being viewed by others
References
Takash Jnour, T. Nakajama, and Y. Ando, IEEE Trans. Electron. Dev. 55(2), 483 (2008).
Y.-F. Wu, A. Saxler, M. Moore, R. P. Smith, S. Sheppard, P. M. Chavarkar, T. Wisleder, U. K. Mishra, and P. Parikh, IEEE Electron. Dev. Lett. 25(3), 117 (2004).
M. Higashiwaki, N. Onojima, T. Matsui, and T. Minura, in Proc. of the Intern. Conf. on Nitride Semiconductors (Bremen, Germany, 2005), Paper We-ED2-4.
T. Palacios, A. Chakraborty, S. Heikman, S. Keller, S. P. DenBaars, and U. K. Mishra, IEEE Electron. Dev. Lett. 27(1), 15 (2006).
V. G. Mokerov, A. A. Kuznetsov, Yu. V. Fedorov, E. N. Enyushkina, A. S. Bugaev, A. Yu. Pavlov, D. L. Gnatyuk, A. V. Zuev, R. R. Galiev, Yu. N. Sveshnikov, A. F. Tsatsul’nikov, V. M. Ustinov, in Proc. of the 6th All-Russ. Conf. on Nitrides of Gallium, Indium and Aluminum — Structures and Devices (Russia, 2008), p. 152.
A. K. Konorev, in Proc. of the 9th Intern. Symp. on Nanostructures, Physics and Technol. (St. Petersburg, Russia, 2001), p. 230.
G. Dambrine, T. Parenty, S. Bollaert, H. Happy, A. Cappy, J. Mateos, T. Nahri, J. C. Orthoc, M. Trier, P. Bander, and P. Landry, in Proc. of the 11th Eur. Conf. on Gallium Arsenide and other Compound Semiconductors Application Symposium, ICM (Munich, Germany, 2003), p. 473.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © V.G. Mokerov, A.L. Kuznetsov, Yu.V. Fedorov, A.S. Bugaev, A.Yu. Pavlov, E.N. Enyushkina, D.L. Gnatyuk, A.V. Zuev, R.R. Galiev, E.N. Ovcharenko, Yu.N. Sveshnikov, A.F. Tsatsulnikov, V.M. Ustinov, 2009, published in Fizika i Tekhnika Poluprovodnikov, 2009, Vol. 43, No. 4, pp. 561–567.
Rights and permissions
About this article
Cite this article
Mokerov, V.G., Kuznetsov, A.L., Fedorov, Y.V. et al. AlGaN/GaN-HEMTs with a breakdown voltage higher than 100 V and maximum oscillation frequency f max as high as 100 GHz. Semiconductors 43, 537–543 (2009). https://doi.org/10.1134/S1063782609040253
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782609040253