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High-Density Helicon Plasma Source for Linear Plasma Generators

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Abstract—

Results of experiments on a linear facility with a helicon plasma source operating at a frequency of 13.56 MHz and a power of up to 15 kW are reported. In the experiments, different antennas (coil, NAGOYA TYPE III, and half-wave helicon) with azimuthal wavenumbers of m = 0, ±1 were used. Plasma density and electron temperature radial profiles for antennas of these types were measured as a function of the magnetic field under the antenna and the gas pressure. The maximum plasma density obtained in the experiments was 2 × 1013 cm–3 at a magnetic field of ~200 G.

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Funding

This study was supported by the Russian Foundation for Basic Research, project no. 19-32-90117 “RF source of high-density plasma based on a helicon discharge in inhomogeneous outer magnetic field for PMI studies.”

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Correspondence to E. I. Kuzmin.

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Translated by E. Bondareva

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Kuzmin, E.I., Shikhovtsev, I.V. High-Density Helicon Plasma Source for Linear Plasma Generators. Plasma Phys. Rep. 47, 526–535 (2021). https://doi.org/10.1134/S1063780X21060118

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  • DOI: https://doi.org/10.1134/S1063780X21060118

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