Abstract—
Results of experiments on a linear facility with a helicon plasma source operating at a frequency of 13.56 MHz and a power of up to 15 kW are reported. In the experiments, different antennas (coil, NAGOYA TYPE III, and half-wave helicon) with azimuthal wavenumbers of m = 0, ±1 were used. Plasma density and electron temperature radial profiles for antennas of these types were measured as a function of the magnetic field under the antenna and the gas pressure. The maximum plasma density obtained in the experiments was 2 × 1013 cm–3 at a magnetic field of ~200 G.
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REFERENCES
A. Kreter, C. Brandt, A. Huber, S. Kraus, S. Moller, M. Reinhart, B. Schweer, G. Sergienko, and B. Unterberg, Fusion Sci. Technol. 68, 8 (2015). https://doi.org/10.13182/FST14-906
A. A. Ivanov, V. I. Davydenko, I. A. Kotelnikov, A. Kreter, V. V. Mishagin, I. A. Prokhorov, I. V. Shikhovtsev, and B. Unterberg, Fusion Sci. Technol. 63, 217 (2013).
Ch. Linsmeier, B. Unterberg, J. W. Coenen, R. P. Doerner, H. Greuner, A. Kreter, J. Linke, and H. Maier, Nucl. Fusion 57, 092012 (2017). https://doi.org/10.1088/1741-4326/aa4feb
B. D. Blackwell, J. F. Caneses, C. M. Samuell, J. Wach, J. Howard, and C. Corr, Plasma Sources Sci. Technol. 21, 055033 (2012). https://doi.org/10.1088/0963-0252/21/5/055033
S. C. Thakur, M. J. Simmonds, J. F. Caneses, F. Chang, R. P. Doerner, R. Goulding, A. Lumsdaine, J. Rapp, and G. R. Tynan, arXiv:2005.11214. https://arxiv.org/abs/2005.11214.
V. F. Virko, K. P. Shamrai, Yu. V. Virko, and G. S. Kirichenko, Phys. Plasmas 11, 3888 (2004). https://doi.org/10.1063/1.1764830
A. A. Ivanov and V. V. Prikhod’ko, Phys.–Usp. 60, 509 (2017).
A. V. Timofeev, Plasma Phys. Rep. 28, 906 (2002).
A. A. Ivanov, I. V. Shikhovtsev, A. A. Podyminogin, I. I. Averbukh, T. D. Akhmetov, V. I. Davydenko, and P. P. Deichuli, Plasma Phys. Rep. 28, 196 (2002).
V. F. Virko, G. S. Kirichenko, and K. P. Shamrai, Plasma Sources Sci. Technol. 11, 10 (2002). https://doi.org/10.1088/0963-0252/11/1/302
F. F. Chen, Plasma Phys. Control. Fusion 33, 339 (1991).
L. Porte, S. M. Yun, D. Arnush, and F. F. Chen, Plasma Sources Sci. Technol. 12, 287 (2003). https://doi.org/10.1088/0963-0252/12/2/320
D. G. Miljak and F. F. Chen, Plasma Sources Sci. Technol. 7, 61 (1998).
D. D. Blackwell and F. F. Chen, Plasma Sources Sci. Technol. 6, 569 (1997).
D. Arnush and F. F. Chen, Phys. Plasmas 5, 1239 (1998). https://doi.org/10.1063/1.872782
I. A. Kotelnikov, Phys. Plasmas 21, 122101 (2014). https://doi.org/10.1063/1.4903329
M. Yoshitaka, H. Nakashima, F. W. Baity, Jr., R. H. Goulding, M. D. Carter, and D. O. Sparks, Thin Solid Films 506−507, 583 (2006). https://doi.org/10.1016/j.tsf.2005.08.063
D. Arnush, Phys. Plasmas 7, 3042 (2000).
Funding
This study was supported by the Russian Foundation for Basic Research, project no. 19-32-90117 “RF source of high-density plasma based on a helicon discharge in inhomogeneous outer magnetic field for PMI studies.”
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Kuzmin, E.I., Shikhovtsev, I.V. High-Density Helicon Plasma Source for Linear Plasma Generators. Plasma Phys. Rep. 47, 526–535 (2021). https://doi.org/10.1134/S1063780X21060118
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DOI: https://doi.org/10.1134/S1063780X21060118