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Effect of the dc field on the near-surface plasma of a highly nonuniform microwave discharge

  • Plasma-Surface Interaction
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Abstract

The effect of the dc electric field on the near-surface plasma of an electrode microwave discharge at pressures of 1–5 Torr was studied by the emission spectroscopy method. It is shown that the dc field weakly affects the vibrational distribution of nitrogen molecules in the C3Πu state, but changes the structure of the near-surface plasma (shifting the intensity maxima of the emission bands) and the strength of the microwave field near the electrode surface. It is also found that the ratio between the intensities of bands of different sequences of the second positive system of nitrogen radiated from the same state depends on the position along the discharge axis.

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References

  1. Applied Plasma Chemistry, Ed. by Yu. A. Lebedev, N. A. Plate, and V. E. Fortov (Yanus-K, Moscow, 2005), Vol. XI-5 [in Russian].

    Google Scholar 

  2. Applied Plasma Chemistry, Ed. by Yu. A. Lebedev, N. A. Plate, and V. E. Fortov (Yanus-K, Moscow, 2005), Vol. VIII-1 [in Russian].

    Google Scholar 

  3. Proceedings of the 1st-11th International Workshops on Weakly Ionized Gases, Colorado Springs, CO, 1997; Norfolk, VA, 1998, 1999; Anaheim, CA, 2001; Reno, NV, 2003–2008, Orlando, FL, 2009.

  4. Proceedings of the 1st–7th International Workshops on Magneto- and Plasma Aerodynamics for Aerospace Applications, Moscow, 1999–2003, 2005, 2007.

  5. Yu. A. Lebedev, V. A. Shakhatov, A. V. Tatarinov, and I. L. Epstein, J. Phys. Conf. Ser. 44, 30 (2006).

    Article  ADS  Google Scholar 

  6. Yu. A. Lebedev, M. V. Mokeev, P. V. Solomakhin, et al., J. Phys. D 41, 194001 (2008).

    Article  ADS  Google Scholar 

  7. Yu. A. Lebedev, V. A. Shakhatov, A. V. Tatarinov, and I. L. Epstein, J. Phys. Conf. Ser. 207, 012002 (2010).

    Article  ADS  Google Scholar 

  8. Yu. A. Lebedev, A. V. Tatarinov, and I. L. Epshtein, High Temp. 45, 283 (2007).

    Article  Google Scholar 

  9. Yu. A. Lebedev and M. V. Mokeev, High Temp. 38, 358 (2000).

    Article  Google Scholar 

  10. L. Bardos and Yu. A. Lebedev, High Temp. 38, 528 (2000).

    Article  Google Scholar 

  11. Kh. A. Dzherpetov and G. M. Petyuk, Sov. Phys. JETP 1, 325 (1955).

    Google Scholar 

  12. V. A. Dovzhenko, S. I. Kuznetsov, P. P. Mel’nichenko, and G. S. Solntsev, Sov. Phys. Tech. Phys. 22, 461 (1977).

    Google Scholar 

  13. V. A. Godyak and O. A. Popov, Sov. Phys. Tech. Phys. 22, 1454 (1977).

    Google Scholar 

  14. Yu. A. Lebedev, P. V. Solomakhin, and V. A. Shakhatov, Plasma Phys. Rep. 34, 562 (2008).

    Article  ADS  Google Scholar 

  15. Yu. A. Lebedev, T. B. Mavludov, I. L. Epstein, et al., Plasma Sources Sci. Technol. 21, 015015 (2012).

    Article  ADS  Google Scholar 

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Original Russian Text © Yu.A. Lebedev, E.V. Yusupova, 2012, published in Fizika Plazmy, 2012, Vol. 38, No. 8, pp. 677–683.

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Lebedev, Y.A., Yusupova, E.V. Effect of the dc field on the near-surface plasma of a highly nonuniform microwave discharge. Plasma Phys. Rep. 38, 620–626 (2012). https://doi.org/10.1134/S1063780X1208017X

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  • DOI: https://doi.org/10.1134/S1063780X1208017X

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