Abstract
Data collected with an atom probe tomograph allow to reconstruct 3D atom maps of chemical element atoms with high accuracy. Due to the permanent improvement of AP installations, new 3D reconstruction procedures are required. This work proposes an improved approach for atom probe data reconstruction which uses dynamic parameters and a calibration based on the material density.
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ACKNOWLEDGMENTS
The atom probe tomography study was performed at the Center of Collaborative Access KAMIKS (http://kamiks. itep.ru/), Institute of Theoretical and Experimental Physics of National Research Center “Kurchatov Institute”.
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Lukyanchuk, A.A., Aleev, A.A., Shutov, A.S. et al. Atom Probe Tomography Data Reconstruction with the Correction on Material Density. Phys. Atom. Nuclei 84, 1836–1842 (2021). https://doi.org/10.1134/S1063778821120048
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DOI: https://doi.org/10.1134/S1063778821120048