Abstract
The application of time–frequency wavelet analysis for solving the reflectometry inverse problem is considered. It is shown that a simultaneous transform of specular intensity curve, depending on the grazing angle and spatial frequency, allows one to determine not only the thickness but also the alteration order of individual regions (layers) with characteristic behavior of electron density. This information makes it possible to reconstruct the electron density profile in the film cross section as a whole (i.e., to solve the inverse reflectometry problem). The application of the time–frequency transform is illustrated by examples of reconstructing (based on X-ray reflectivity data) the layer alternation order in models of two-layer films with inverted arrangement of layers and a four-layer film on a solid substrate.
Similar content being viewed by others
References
A. Grossman and J. Morlet, SIAM Math. Anal. 15, 723 (1984).
S. Mallat, A Wavelet Tour of Signal Processing. The Sparse Way (Academic, 2008).
L. G. Parratt, Phys. Rev. 95 (2), 359 (1954).
D. S. Sivia, W. A. Hamilton, G. S. Smith, et al., J. Appl. Phys. 70 (2), 732 (1991).
S. B. Astaf’ev, B. M. Shchedrin, and L. G. Yanusova, Crystallogr. Rep. 55 (1), 127 (2010).
N. M. Astaf’eva, Usp. Fiz. Nauk 166 (11), 1145 (1996).
S. B. Astaf’ev, B. M. Shchedrin, and L. G. Yanusova, Crystallogr. Rep. 57 (1), 134 (2012).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © S.B. Astaf’ev, B.M. Shchedrin, L.G. Yanusova, 2017, published in Kristallografiya, 2017, Vol. 62, No. 2, pp. 311–316.
Rights and permissions
About this article
Cite this article
Astaf’ev, S.B., Shchedrin, B.M. & Yanusova, L.G. Application of time–frequency wavelet analysis in the reflectometry of thin films. Crystallogr. Rep. 62, 318–323 (2017). https://doi.org/10.1134/S1063774517020055
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063774517020055