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Three-dimensional reconstruction of a surface based on scanning electron microscopy images

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Abstract

Modern methods of three-dimensional reconstruction of sample surfaces based on scanning electron microscopy images allow one to quantitatively estimate morphological surface characteristics (specifically, parameters of irregularities, volumes of convexities and concavities, etc.). The accuracy of the method is analyzed by an example of commercial and specially prepared test samples. Examples of application to various objects are given.

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Authors and Affiliations

  1. National Research Centre “Kurchatov Institute”, pl. Akademika Kurchatova 1, Moscow, 123182, Russia

    A. A. Mikhutkin & A. L. Vasiliev

  2. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    A. L. Vasiliev

Authors
  1. A. A. Mikhutkin
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  2. A. L. Vasiliev
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Correspondence to A. L. Vasiliev.

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Dedicated to the International Year of Crystallography

Original Russian Text © A.A. Mikhutkin, A.L. Vasiliev, 2014, published in Kristallografiya, 2014, Vol. 59, No. 6, pp. 999–1007.

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Mikhutkin, A.A., Vasiliev, A.L. Three-dimensional reconstruction of a surface based on scanning electron microscopy images. Crystallogr. Rep. 59, 908–915 (2014). https://doi.org/10.1134/S1063774514060212

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  • DOI: https://doi.org/10.1134/S1063774514060212

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