Abstract
An automated measuring system for high-precision three-dimensional analysis of surface nanotopography is described. It is based on a scanning probe microscope modified with a measuring table capable of extensive horizontal motion. This system permits quantitative three-dimensional analysis of surface texture in accordance with the ISO 25178-2:2012 standard.
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References
International Standard ISO 25178-2:2012: Geometric Product Specification (GPS): Surface Texture: Areal. Part 2: Terms, Definitions and Surface Texture Parameters, 2012.
Gogolinskii, K.V., Golubev, S.S., Gubskii, K.L., et al., Study of the metrological characteristics of the measuring scanning probe microscope by means of TGZ calibration gratings, Izmerit. Tekh., 2012, no. 3, pp. 18–21.
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Original Russian Text © V.V. Poroshin, D.Yu. Bogomolov, O.V. Poroshin, 2015, published in STIN, 2015, No. 5, pp. 37–40.
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Poroshin, V.V., Bogomolov, D.Y. & Poroshin, O.V. Automated measuring system for three-dimensional nanotopographic analysis. Russ. Engin. Res. 35, 876–878 (2015). https://doi.org/10.3103/S1068798X15110131
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DOI: https://doi.org/10.3103/S1068798X15110131