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Characterization of single-crystal sapphire substrates by X-ray methods and atomic force microscopy

  • Real Structure of Crystals
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Abstract

The possibility of characterizing a number of practically important parameters of sapphire substrates by X-ray methods is substantiated. These parameters include wafer bending, traces of an incompletely removed damaged layer that formed as a result of mechanical treatment (scratches and marks), surface roughness, damaged layer thickness, and the specific features of the substrate real structure. The features of the real structure of single-crystal sapphire substrates were investigated by nondestructive methods of double-crystal X-ray diffraction and plane-wave X-ray topography. The surface relief of the substrates was investigated by atomic force microscopy and X-ray scattering. The use of supplementing analytical methods yields the most complete information about the structural inhomogeneities and state of crystal surface, which is extremely important for optimizing the technology of substrate preparation for epitaxy.

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References

  1. W. M. Chen, P. J. McNally, Yu. V. Shvyd’ko, et al., Phys. Status Solidi (a) 186, 365 (2001).

    Article  ADS  Google Scholar 

  2. W. M. Chen, P. J. McNally, Yu. V. Shvyd’ko, et al., J. Cryst. Growth 252, 113 (2003).

    Article  ADS  Google Scholar 

  3. A. A. Britvin, A. A. Raskin, Yu. M. Litvinov, and V. F. Pavlov, Proc. X Int. Sci.-Tech. Conf. “High Technologies in Russian Industry” and XVI Int. Symposium “Thin Films in Electronics”, Moscow, 2004, p. 242.

  4. I. L. Shul’pina, V. M. Krymov, Yu. G. Nosov, and P. I. Antonov, Proc. II Sci. Seminar “Modern Methods for Analyzing Diffraction Data”, Velikii Novgorod, 2004, p. 132.

  5. O. Ambacher, J. Phys. D 31, 2653 (1998).

    Article  ADS  Google Scholar 

  6. J. Chaudhuri, M. H. Ng, D. D. Koleske, et al., Mater. Sci. Eng. B 64, 99 (1999).

    Article  Google Scholar 

  7. X. J. Ning, F. R. Chien, P. Pirouz, et al., J. Mater. Res. 11, 580 (1996).

    Article  ADS  Google Scholar 

  8. I. A. Prokhorov and B. G. Zakharov, Poverkhnost’: Rentgen., Sinkhrotr. Neitron. Issled., No. 2, 106 (1999).

  9. J. Cui, A. Sun, M. Reshichkov, et al., MRS Internet J. Nitride Semicond. Res. 5, 7 (2000).

    Google Scholar 

  10. A. R. Lang, Brit. J. Appl. Phys. 14, 904 (1963).

    Article  ADS  Google Scholar 

  11. W. J. Bartels and W. Nijman, J. Cryst. Growth 44, 518 (1978).

    Article  ADS  Google Scholar 

  12. M. L. Zanaveskin, I. S. Zanaveskina, B. S. Roshchin, et al., Vestn. Mosk. Univ. 3, 3 (2006).

    Google Scholar 

  13. V. E. Asadchikov, A. V. Butashin, Yu. O. Volkov, et al., Zavod. Lab. 74(10), 21 (2008).

    Google Scholar 

  14. A. V. Vinogradov, I. V. Kozhevnikov, et al., Trudy FIAN, No. 196, 18 (1989).

Download references

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Authors and Affiliations

  1. Research Center Space Materials Science, Shubnikov Institute of Crystallography (Kaluga Branch), Russian Academy of Sciences, Akademicheskaya ul. 8, Kaluga, 248640, Russia

    I. A. Prokhorov & B. G. Zakharov

  2. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    V. E. Asadchikov, A. V. Butashin, B. S. Roshchin, A. L. Tolstikhina, I. V. Yakimchuk, Yu. O. Volkov, V. M. Kanevskii & E. O. Tikhonov

  3. Russian Research Center Kurchatov Institute, pl. Akademika Kurchatova 1, Moscow, 123182, Russia

    M. L. Zanaveskin, Yu. V. Grishchenko & A. E. Muslimov

Authors
  1. I. A. Prokhorov
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  2. B. G. Zakharov
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  3. V. E. Asadchikov
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  4. A. V. Butashin
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  5. B. S. Roshchin
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  6. A. L. Tolstikhina
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  7. M. L. Zanaveskin
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  8. Yu. V. Grishchenko
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  9. A. E. Muslimov
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  10. I. V. Yakimchuk
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  11. Yu. O. Volkov
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  12. V. M. Kanevskii
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  13. E. O. Tikhonov
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Corresponding author

Correspondence to B. G. Zakharov.

Additional information

Original Russian Text © I.A. Prokhorov, B.G. Zakharov, V.E. Asadchikov, A.V. Butashin, B.S. Roshchin, A.L. Tolstikhina, M.L. Zanaveskin, Yu.V. Grishchenko, A.E. Muslimov, I.V. Yakimchuk, Yu.O. Volkov, V.M. Kanevskii, E.O. Tikhonov, 2011, published in Kristallografiya, 2011, Vol. 56, No. 3, pp. 490–496.

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Prokhorov, I.A., Zakharov, B.G., Asadchikov, V.E. et al. Characterization of single-crystal sapphire substrates by X-ray methods and atomic force microscopy. Crystallogr. Rep. 56, 456–462 (2011). https://doi.org/10.1134/S1063774511030242

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  • DOI: https://doi.org/10.1134/S1063774511030242

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