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Measurements of attenuation and electromechanic coupling constant of piezoelectric films in microwave resonators

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Abstract

It was found that for arbitrary high overtone and thin film microwave resonators the results of the measurements of the difference between frequencies of resonance and antiresonance on any harmonic of the resonator together with the measurement of the frequency difference between the peculiarities on the frequency dependence of imagine part of the electric impedance of the resonator give a simple way of the evaluation of the losses in the materials composing resonator structures and of the evaluation of the electromechanical constant of the piezoelectric film exciting acoustic waves.

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References

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Authors and Affiliations

  1. Institute of Radioengineering and Electronics RAS, Mokhovaya 11-7, Moscow, 125009, Russia

    G. D. Mansfeld, S. G. Alekseev, I. M. Kotelyanskii & N. I. Polzikova

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  1. G. D. Mansfeld
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  2. S. G. Alekseev
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  3. I. M. Kotelyanskii
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  4. N. I. Polzikova
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Correspondence to G. D. Mansfeld.

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Mansfeld, G.D., Alekseev, S.G., Kotelyanskii, I.M. et al. Measurements of attenuation and electromechanic coupling constant of piezoelectric films in microwave resonators. Acoust. Phys. 56, 904–908 (2010). https://doi.org/10.1134/S106377101006014X

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  • DOI: https://doi.org/10.1134/S106377101006014X

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