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Effect of the Electrical Conductivity of a Film on the Characteristics of an Radial Electric Field Excited Acoustic Resonator

  • PHYSICAL ACOUSTICS
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Abstract

The results of a study of the influence of the electrical conductivity of a thin film deposited on the free end of a radial electric field excited acoustic resonator field or located in its immediate vicinity on the resonator characteristics are presented. Three situations were considered: there is no conductive film, the film is deposited directly on the resonator free end, and the film is located at a short distance from the resonator free end. In all three cases, the electrical impedance of the resonator was calculated and measured in a wide frequency range of 1–1500 kHz. For the first time, the material constants of piezoceramics were refined for a free and short-circuited resonator and it was shown that these constants coincide with each other with good accuracy. It is shown that a decrease in the resonator thickness and an increase in the gap between the electrodes increase its sensitivity to the presence of a conductive film at a short distance from the resonator end.

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ACKNOWLEDGMENTS

This work was performed under financial support of Russian Ministry of Science and Higher Education (government task #1021032425796-4-1.3.7; 1.3.2) and the Russian Foundation for Basic Research grant no. 20-07-00602.

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Authors and Affiliations

  1. Saratov Branch of Kotelnikov Institute of Radioengineering and Electronics of RAS, Saratov, 410019, Russia

    A. A. Teplykh, B. D. Zaitsev, A. P. Semyonov & I. A. Borodina

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  1. A. A. Teplykh
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  2. B. D. Zaitsev
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  3. A. P. Semyonov
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  4. I. A. Borodina
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Correspondence to A. A. Teplykh.

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Teplykh, A.A., Zaitsev, B.D., Semyonov, A.P. et al. Effect of the Electrical Conductivity of a Film on the Characteristics of an Radial Electric Field Excited Acoustic Resonator. Acoust. Phys. 68, 564–568 (2022). https://doi.org/10.1134/S1063771022060136

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  • DOI: https://doi.org/10.1134/S1063771022060136

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