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Clean boxes with artificial climate for atomic force microscopy: New possibilities for diagnostics of nanodimensional objects

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Abstract

A clean box with an artificial climate is developed and designed to increase the accuracy of measurements by atomic force microscopy in the air and to improve the reproducibility of the results of diagnostics of the surface. The main functions of the box are the provision and maintenance of the temperature and humidity in the working zone with a high degree of accuracy and in various combinations. The main technical characteristics of the box are presented. The main advantages of operation under the conditions of an artificial climate are analyzed. It is shown that the special procedures give the possibility to eliminate the distorting effect of the static electricity on the surface under investigation and, specifically, to remove the already accumulated charge and prevent its appearance in the course of the experiment. The use of the suggested procedures allows one to correctly describe the specific features of the surface topography of dielectrics at the microscopic and nanoscopic levels.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 117333, Russia

    A. L. Tolstikhina, R. V. Gainutdinov, M. L. Zanaveskin, K. L. Sorokina, N. V. Belugina & Yu. V. Grishchenko

  2. Research Center of Applied Nuclear Physics of Rosatom, ul. Zh. Kyuri 6, Dubna, Moscow oblast, 141980, Russia

    V. D. Shestakov

Authors
  1. A. L. Tolstikhina
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  2. R. V. Gainutdinov
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  3. M. L. Zanaveskin
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  4. K. L. Sorokina
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  5. N. V. Belugina
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  6. Yu. V. Grishchenko
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  7. V. D. Shestakov
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Correspondence to A. L. Tolstikhina.

Additional information

Original Russian Text © A.L. Tolstikhina, R.V. Gainutdinov, M.L. Zanaveskin, K.L. Sorokina, N.V. Belugina, Yu.V. Grishchenko, V.D. Shestakov, 2009, published in Mikroelektronika, 2009, Vol. 38, No.2, pp. 122–129.

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Tolstikhina, A.L., Gainutdinov, R.V., Zanaveskin, M.L. et al. Clean boxes with artificial climate for atomic force microscopy: New possibilities for diagnostics of nanodimensional objects. Russ Microelectron 38, 110–117 (2009). https://doi.org/10.1134/S1063739709020048

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  • DOI: https://doi.org/10.1134/S1063739709020048

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