Abstract
A qualified clean room environment has specific requirements for not only particle control but also temperature, humidity, pressure, and oxygen levels which are supplied and controlled by other essential systems. It includes air conditioning systems, circulating and cooling water system, vacuum system, and exhaust system. Together it provides necessary conditions for manufacturing processes and normal operation. This chapter further gives the introduction with flow charts of those systems.
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Xiao, D. (2024). Clean Room and Air Conditioning Systems. In: Wang, Y., Chi, MH., Lou, J.JC., Chen, CZ. (eds) Handbook of Integrated Circuit Industry. Springer, Singapore. https://doi.org/10.1007/978-981-99-2836-1_29
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DOI: https://doi.org/10.1007/978-981-99-2836-1_29
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Publisher Name: Springer, Singapore
Print ISBN: 978-981-99-2835-4
Online ISBN: 978-981-99-2836-1
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