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Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis

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Abstract

The review is devoted to modern techniques of the nondestructive determination of the thickness of thin films based on scanning electron microscopy and energy dispersive X-ray analysis. A general approach for determining the thickness of thin films by these methods is described along with detailed specific techniques, their advantages and disadvantages.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    S. A. Sokolov & L. N. Sidorov

  2. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 119991, Moscow, Russia

    S. A. Sokolov & R. A. Milovanov

  3. Moscow Technological University, 119454, Moscow, Russia

    R. A. Milovanov

Authors
  1. S. A. Sokolov
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  2. R. A. Milovanov
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  3. L. N. Sidorov
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Correspondence to S. A. Sokolov.

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Translated by G. Dedkov

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Sokolov, S.A., Milovanov, R.A. & Sidorov, L.N. Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis. J. Surf. Investig. 13, 836–847 (2019). https://doi.org/10.1134/S1027451019050136

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  • DOI: https://doi.org/10.1134/S1027451019050136

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