Abstract
We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons.
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Original Russian Text © V.V. Kazmiruk, I.G. Kurganov, N.N. Osipov, A.A. Podkopaev, T.N. Savitskaya, 2016, published in Poverkhnost’, 2016, No. 9, pp. 7–11.
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Kazmiruk, V.V., Kurganov, I.G., Osipov, N.N. et al. Investigation of secondary-emission signal formation in the low-voltage SEM mode. J. Surf. Investig. 10, 887–891 (2016). https://doi.org/10.1134/S1027451016050086
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DOI: https://doi.org/10.1134/S1027451016050086