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Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode

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Abstract

A mathematical model of a SEM (scanning electron microscopy) signal formed by true secondary electrons, i.e., electrons emitted by a sample under the action of primary and inelastically scattered electrons, is proposed. Good agreement between the simulated signals and experimental results obtained on an Auriga (Carl Zeiss) device is attained.

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Authors and Affiliations

  1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Science, Chernogolovka, Moscow oblast, 142432, Russia

    V. V. Kazmiruk, I. G. Kurganov, N. N. Osipov, A. A. Podkopaev & T. N. Savitskaya

Authors
  1. V. V. Kazmiruk
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  2. I. G. Kurganov
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  3. N. N. Osipov
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  4. A. A. Podkopaev
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  5. T. N. Savitskaya
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Correspondence to V. V. Kazmiruk.

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Original Russian Text © V.V. Kazmiruk, I.G. Kurganov, N.N. Osipov, A.A. Podkopaev, T.N. Savitskaya, 2017, published in Poverkhnost’, 2017, No. 4, pp. 21–24.

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Kazmiruk, V.V., Kurganov, I.G., Osipov, N.N. et al. Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode. J. Surf. Investig. 11, 404–407 (2017). https://doi.org/10.1134/S1027451017020288

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  • DOI: https://doi.org/10.1134/S1027451017020288

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