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Design of a soft X-ray and extreme UV reflectometer equipped with a high-resolution monochromator and high-brightness laser-plasma radiation source

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Abstract

The design of a reflectometer intended for investigating the reflection and transmission coefficients of components of X-ray optics in the wavelength range of 1–25 nm is described. A Czerny-Turner spectrometer with a planar diffraction grating and parabolic collimators is employed to monochromatize the radiation. The required geometry of the monochromatic probe beam is ensured by means of a toroidal mirror. The X-ray source is laser plasma. The expected average spectral radiation power on the sample under study is on the order of 107 photon/s in the spectral band 0.1 nm. A goniometer provides five and two degrees of freedom of the sample 500 mm in diameter and detector, respectively.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    V. O. Dogadin, S. Yu. Zuev, N. N. Salashchenko, N. I. Chkhalo & A. V. Shcherbakov

  2. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603950, Russia

    V. O. Dogadin

Authors
  1. V. O. Dogadin
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  2. S. Yu. Zuev
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  3. N. N. Salashchenko
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  4. N. I. Chkhalo
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  5. A. V. Shcherbakov
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Corresponding author

Correspondence to N. I. Chkhalo.

Additional information

Original Russian Text © V.O. Dogadin, S.Yu. Zuev, N.N. Salashchenko, N.I. Chkhalo, A.V. Shcherbakov, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 7, pp. 77–86.

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Dogadin, V.O., Zuev, S.Y., Salashchenko, N.N. et al. Design of a soft X-ray and extreme UV reflectometer equipped with a high-resolution monochromator and high-brightness laser-plasma radiation source. J. Surf. Investig. 9, 726–734 (2015). https://doi.org/10.1134/S1027451015040072

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  • DOI: https://doi.org/10.1134/S1027451015040072

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