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Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

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Abstract

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

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Authors and Affiliations

  1. National Research Tomsk Polytechnic University, Tomsk, 634050, Russia

    N. N. Nikitenkov, E. S. Kiselyova, M. E. Konischev, V. S. Sypchenko, A. N. Nikitenkov, V. F. Pichugin & I. A. Shylepov

  2. Institut für Anorganische Chemie Duisburg-Essen, Essen, 45117, Germany

    M. Epple

Authors
  1. N. N. Nikitenkov
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  2. E. S. Kiselyova
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  3. M. E. Konischev
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  4. V. S. Sypchenko
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  5. A. N. Nikitenkov
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  6. V. F. Pichugin
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  7. I. A. Shylepov
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  8. M. Epple
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Corresponding author

Correspondence to N. N. Nikitenkov.

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Original Russian Text © N.N. Nikitenkov, E.S. Kiselyova, M.E. Konischev, V.S. Sypchenko, A.N. Nikitenkov, V.F. Pichugin, I.A. Shylepov, M. Epple, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 12, pp. 21–25.

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Nikitenkov, N.N., Kiselyova, E.S., Konischev, M.E. et al. Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering. J. Surf. Investig. 8, 1230–1234 (2014). https://doi.org/10.1134/S1027451014060391

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  • DOI: https://doi.org/10.1134/S1027451014060391

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