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Comparison of the hardness of TiC/a-C coatings obtained by the method of the magnetron sputtering of a graphite target with high- and low-power pulses

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Abstract

TiC/a-C coatings 0.1–2.0 μm thick are deposited onto substrates made of (WC + Ti) hard alloy or stainless steel by the method of the pulsed magnetron sputtering of Ti and graphite targets. The microhardness of coatings obtained by the sputtering of a graphite target by pulses of high (∼1 kW/cm2) and low power (∼25 W/cm2) is compared. The effect of the coating thickness on the measured value of the microhardness is investigated. It is shown that maximum values of coating hardness (35 ± 5 GPa) are attained at a Ti/C ratio of 0.6–0.9.

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Authors and Affiliations

  1. Institute of Electrophysics, Ural Branch, Russian Academy of Science, Yekaterinburg, 620016, Russia

    A. S. Mamaev & A. S. Kaygorodov

Authors
  1. A. S. Mamaev
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  2. A. S. Kaygorodov
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Correspondence to A. S. Mamaev.

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Original Russian Text © A.S. Mamaev, A.S. Kaygorodov, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 11, pp. 32–36.

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Mamaev, A.S., Kaygorodov, A.S. Comparison of the hardness of TiC/a-C coatings obtained by the method of the magnetron sputtering of a graphite target with high- and low-power pulses. J. Surf. Investig. 8, 1119–1123 (2014). https://doi.org/10.1134/S102745101406010X

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  • DOI: https://doi.org/10.1134/S102745101406010X

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