Abstract
Correlations between the optical and structural characteristics of nanocrystalline silicon-carbide (nc-SiC) films prepared by direct ion deposition onto sapphire substrates are studied. The effect of the scattering of electromagnetic radiation in nc-SiC films on their optical characteristics (transmittance, reflectance, and absorbance) is investigated. It is shown that in nc-SiC films deposited at temperatures <700°C scattering is minimum due to their morphological and structural homogeneity. The films deposited at >1000°C exhibit significant morphological and structural heterogeneity and therefore strongly scatter light. It is established that the account for light scattering leads to a blue shift of the fundamental absorption edge in the optical density spectra. The spectra of the scattering coefficients for the nc-SiC films are studied and calculated. The effect of high-temperature annealing on the film structure and scattering spectra is investigated. It is demonstrated that the structural variations induced by annealing are accompanied by a change of the initial mechanism of Rayleigh scattering in the nc-SiC films for the Mie scattering.
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Original Russian Text © A.V. Semenov, A.V. Lopin, V.M. Puzikov, P.V. Mateichenko, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 2, pp. 58–64.
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Semenov, A.V., Lopin, A.V., Puzikov, V.M. et al. Light scattering in nanocrystalline silicon-carbide (nc-SiC) films. J. Surf. Investig. 8, 149–154 (2014). https://doi.org/10.1134/S1027451014010388
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DOI: https://doi.org/10.1134/S1027451014010388