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Scanning-probe-induced local decomposition of solid germanium monoxide films: The nano-pattering of germanium

  • Proceedings of XXII Russian Conference on Electron Microscopy (Scintific Council of RAS on Electron Microscopy, Institute of Microelectronics Technology and High Purity Materials of RAS, Shubnikov Institute of Crystallography RAS, Chernogolovka, June 2008,
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Abstract

The possibility of forming the Ge-based wires with the nanoscale’s lateral resolution using the local modification of GeO(sol) films by a scanning probe microscope was demonstrated for the first time. The property of the solid germanium monoxide films, namely, their metastability, was used to decompose the GeO film on Ge and GeO2 by running the high-density electric current under the probe of the atomic force microscope.

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Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    K. N. Astankova, D. V. Sheglov, E. B. Gorokhov, V. A. Volodin, A. G. Cherkov & A. V. Latyshev

  2. Novosibirsk State University, Novosibirsk, Russia

    D. V. Sheglov, V. A. Volodin & A. V. Latyshev

  3. Universite Henri Poincare Nancy 1, Nancy, France

    M. Vergnat

Authors
  1. K. N. Astankova
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  2. D. V. Sheglov
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  3. E. B. Gorokhov
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  4. V. A. Volodin
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  5. A. G. Cherkov
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  6. A. V. Latyshev
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  7. M. Vergnat
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Additional information

Original Russian Text © K.N. Astankova, D.V. Sheglov, E.B. Gorokhov, V.A. Volodin, A.G. Cherkov, A.V. Latyshev, M. Vergnat, 2009, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 10, pp. 29–36.

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Astankova, K.N., Sheglov, D.V., Gorokhov, E.B. et al. Scanning-probe-induced local decomposition of solid germanium monoxide films: The nano-pattering of germanium. J. Surf. Investig. 3, 773–780 (2009). https://doi.org/10.1134/S102745100905019X

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  • DOI: https://doi.org/10.1134/S102745100905019X

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