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Mass spectrometry study of the kinetics of CdTe molecular-beam epitaxy: Part I. Cd, Te2, and CdTe

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Abstract

Surface processes in CdTe molecular-beam epitaxy were studied using in situ mass spectrometry. Modulated molecular Cd and Te2 beams were used for measuring kinetic parameters. The experiments were performed at crystal temperatures of 600–730 K. The results were processed within a model in which condensation and evaporation occur through adsorption and desorption stages. The desorption rate was 2–10 s−1 for Te2 and more than 30 s−1 for Cd. The CdTe evaporation activation energy and desorption energies were determined as E ev = 1.1 eV, E d (Cd) = 1.0 eV, and E d (Te) = 0.6 eV. The adsorbate coverage was estimated as n(Cd) < 0.01 and n(Te) = 0.1–1 Te.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    V. I. Mikhailov, L. E. Polyak & V. M. Kanevskii

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  1. V. I. Mikhailov
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  2. L. E. Polyak
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  3. V. M. Kanevskii
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Original Russian Text © V.I. Mikhailov, L.E. Polyak, V.M. Kanevskii, 2007, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 6, pp. 53–58.

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Mikhailov, V.I., Polyak, L.E. & Kanevskii, V.M. Mass spectrometry study of the kinetics of CdTe molecular-beam epitaxy: Part I. Cd, Te2, and CdTe. J. Surf. Investig. 1, 342–347 (2007). https://doi.org/10.1134/S1027451007030196

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  • DOI: https://doi.org/10.1134/S1027451007030196

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