Abstract
A new combined numerical algorithm PIC-MCC (the particle-in-cell method with the collisions modelling by the Monte Carlo method) has been developed for a rapid computation of a radio-frequency (RF) discharge under a low pressure and a high plasma concentration. The results of test computations for various regimes of the capacitive RF discharge glow in argon and helium well agree with experimental data. A high efficiency of the new approach (the combined PIC-MCC algorithm) is demonstrated for modelling the electrons heating in the collisionless regime.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
C.K. Birdsall and A.B. Langdon, Plasma Physics via Computer Simulation, McGraw-Hill New York, 1985.
C.K. Birdsall, Particle-in-cell charge-particle simulations, plus monte-carlo collisions with neutral atoms, PIC-MCC, IEEE Trans. Plasma Sci., 1991, Vol. 19,No. 2, P. 65–85.
D.L. Scharfetter and H.K. Gummel, Large signal analysis of a silicon read diode oscillator, IEEE Trans. on Electron Devices, 1969, Vol. ED-16, P. 64–77.
J-P. Boeuf, Numerical model of RF glow discharges, Phys. Rev. A, 1987, Vol. 36, P. 2782–2792.
C.K. Birdsall, E. Kawamura, and V. Vahedi, Physical and numerical methods of speeding up particle codes and paralleling as applied to RF discharges, Plasma Sources, Sci. and Techn., 2000, Vol. 9, P. 413–428.
R.W. Hockney and J.W. Eastwood, Computer Simulation Using Particles, McGraw-Hill, New York, 1981.
W.M. Maheimer, M. Lampe, and G. Joyce, Langevin representation of coulomb collisions in PIC simulations, J. Comp. Phys., 1997, Vol. 138, P. 563–584.
V.A. Godyak, R.B. Piejak, and B.M. Alexandrovich, Ion bombardment secondary electron maintenance of steady RF discharge, IEEE Trans. Plasma Sci., 1986, Vol. 14, P. 112–123.
R. Lagushenko and J. Maya, Electron swarm parameters in rare gases and mixtures, J. Appl. Phys., 1984, Vol. 55, No. 9, P. 3293–3300.
V.V. Ivanov, A.M. Popov, and T.V. Rakhimov, Three-dimensional structure of the RF discharge in low-pressure argon, Plasma Physics Reports, 1995, Vol. 21, No. 6, P. 548–553.
E.W. McDaniel, Collision Phenomena in Ionized Gases, John Wiley & Sons, Inc., New York-London-Sydney, 1964.
Yu.P. Raiser, Gas Discharge Physics, Nauka, Moscow, 1987.
S.M. Levitsky, Three-dimensional potential and electrode dusting in radio-frequency discharge, Sov. Phys. — J. Techn. Phys., 1957, Vol. 2, P. 887–894.
G.J. Parker, W.N.G. Hitchon, and J.E. Lawler, Kinetic modeling of the α to γ transition in radiofrequency discharges, Phys. Fluids B, 1993, Vol. 5, No. 2, P. 646–649.
Ph. Belenguer and J.-P. Boeuf, Transition between different regimes of RF glow discharges, Phys. Rev. A, 1990, Vol. 41, P. 4447–4459.
J.P. Bouef, Characteristics of a dusty nonthermal plasma from a particle-in-cell Monte-Carlo simulation, Ibid., 1992, Vol. 46, P. 7910–7922.
S.V. Berezhnoi, I.D. Kaganovich, and L.D. Tsendin, Generation of cold electrons in a low-pressure RF capacitive discharge as an analog of a thermal explosion, Plasma Physics Reports, 1998, Vol. 24, P. 603–610.
Author information
Authors and Affiliations
Additional information
This work was supported by RFBR-Flanders grant No. 05-02-19809.
Rights and permissions
About this article
Cite this article
Shveygert, V.A., Shveygert, I.V. Accelerated combined PIC-MCC algorithm for computation of capacitive radio-frequency discharge. Thermophys. Aeromech. 13, 435–444 (2006). https://doi.org/10.1134/S0869864306030140
Received:
Issue Date:
DOI: https://doi.org/10.1134/S0869864306030140