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One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

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Abstract

We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

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Acknowledgments

This study was partly supported by JSPS KAKENHI Grant Number JP20H00142.

Funding

Funding was provided Japan Society for the promotion of Science (Grant No.: JP20H00142).

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Authors and Affiliations

  1. Graduate School of Information Science and Electrical Engineering, Kyushu University, Motooka, Nishi-Ku, Fukuoka, 819-0395, Japan

    Iori Nagao, Kunihiro Kamataki, Akihiro Yamamoto, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga & Masaharu Shiratani

  2. National Institute of Natural Sciences, Toranomon, Minato-Ku, Tokyo, 105-0001, Japan

    Kazunori Koga

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  1. Iori Nagao
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  2. Kunihiro Kamataki
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  4. Michihiro Otaka
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  5. Yuma Yamamoto
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  10. Kazunori Koga
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  11. Masaharu Shiratani
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Correspondence to Iori Nagao.

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Nagao, I., Kamataki, K., Yamamoto, A. et al. One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges. MRS Advances 7, 911–917 (2022). https://doi.org/10.1557/s43580-022-00417-w

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  • DOI: https://doi.org/10.1557/s43580-022-00417-w

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