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Modification of the microstructure of TiN-based columnar coatings in indentation zones

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Russian Metallurgy (Metally) Aims and scope

Abstract

The columnar structure of titanium nitride-based coatings deposited by magnetron sputtering is studied. The structure-phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at boundaries, and their change during coating growth are determined. The detected decrease (several tens of percent) in the coating thickness under an indenter indicates plastic deformation of a coating. On a microscopic level, this deformation manifests itself in an increase in the density, the misorientation, and the nonequilibrium of boundaries.

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Authors and Affiliations

  1. Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences, pr. Akademicheskii 2/4, Tomsk, 634021, Russia

    S. V. Ovchinnikov & Yu. P. Pinzhin

  2. Tomsk State University, Novosobornaya pl. 1, Tomsk, 634050, Russia

    A. D. Korotaev

Authors
  1. S. V. Ovchinnikov
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  2. A. D. Korotaev
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  3. Yu. P. Pinzhin
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Correspondence to S. V. Ovchinnikov.

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Original Russian Text © S.V. Ovchinnikov, A.D. Korotaev, Yu.P. Pinzhin, 2014, published in Deformatsiya i Razrushenie Materialov, 2014, No. 3, pp. 24–32.

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Ovchinnikov, S.V., Korotaev, A.D. & Pinzhin, Y.P. Modification of the microstructure of TiN-based columnar coatings in indentation zones. Russ. Metall. 2015, 278–284 (2015). https://doi.org/10.1134/S0036029515040126

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  • DOI: https://doi.org/10.1134/S0036029515040126

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