Abstract
The contribution from the solid-phase interactions in the PbO + Sb2O3 and PbO + Bi2O3 activating compositions to the multichannel process of GaAs thermal oxidation has been determined by spatial separation of the oxides. The solid-phase interactions make a positive contribution to the overall negative nonlinear effect in the dependence of the oxide film thickness on the GaAs surface on the activator batch composition. The contributions from the oxide interactions on the semiconductor surface and in the gas phase have been evaluated for the PbO + Sb2O3 composition.
Similar content being viewed by others
References
I. Ya. Mittova, V. R. Pshestanchik, and V. F. Kostryukov, Dokl. Akad. Nauk 378(6), 775 (2001) [Dokl. Chem. 378 (4–6), 165 (2001)].
I. Ya. Mittova, V. R. Pshestanchik, V. F. Kostryukov, and I. A. Donkareva, Dokl. Akad. Nauk 386(4), 499 (2002) [Dokl. Chem. 386 (4–6), 258 (2002)].
J. Goldstein, D. Newberry, P. Echlin, et al., Scanning Electron Microscopy and X-ray Microanalysis (Plenum, New York, 1981; Mir, Moscow, 1984).
A. Meisel, G. Leonhardt, and R. Szargan, Rentgenspectren und chemische Bindung (Akademische, Leipzig, 1977; Naukova Dumka, Kiev, 1981).
I. S. Kulikov, Thermodynamics of Oxides: A Handbook (Metallurgiya, Moscow, 1986) [in Russian].
E. K. Kazenas and Yu. V. Tsvetkov, Evaporation of Oxides (Nauka, Moscow, 1997) [in Russian].
Author information
Authors and Affiliations
Additional information
Original Russian Text © I.Ya. Mittova, V.F. Kostryukov, V.R. Pshestanchik, I.A. Donkareva, B.L. Agapov, 2008, published in Zhurnal Neorganicheskoi Khimii, 2008, Vol. 53, No. 7, pp. 1099–1104.
Rights and permissions
About this article
Cite this article
Mittova, I.Y., Kostryukov, V.F., Pshestanchik, V.R. et al. Contribution from the solid-phase interactions of activating oxides to their nonlinear joint effect on the thermal oxidation of GaAs. Russ. J. Inorg. Chem. 53, 1018–1023 (2008). https://doi.org/10.1134/S0036023608070085
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0036023608070085