Abstract
This paper is devoted to a theoretical analysis of equilibrium adsorption of the components of the W-F system on the basal planes of a tungsten single crystal. A complete data bank of thermochemical constants has been compiled for tungsten fluorides in the monomeric and oligomeric forms and for fluorine. Equilibrium pressures of gaseous components of the W-F system have been calculated in a wide temperature range; the gaseous phase has been shown to mainly contain WF6, WF3, WF4, and F. Equilibrium parameters of adsorption for all components on W (100) and (110) planes have been calculated to show that these planes are saturated mostly by tungsten pentafluoride and elementary fluorine. The degree of coverage depends only moderately on the temperature and the total pressure of the reaction mixture. There is a specific feature of the adsorbed layer in fluoride systems in the existence of very strong lateral interactions between the adsorbed fluorides and fluorine.
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Evstyukhin, A.I., Nechaev, V.V., and Gavrilov, I.I., in Metallurgiya i metallovedenie chistykh metallov (Metallurgy and Metallography of Pure Metals), Moscow: Atomizdat, 1975, Issue 11, pp. 10–14.
Zel’dovich, Ya.B., Zh. Fiz. Khim., 1938, No. 5, pp. 685–687.
Sinyarev, G.B., Vatolin, N.A., Trusov, B.G., and Moiseev, G.K., Primenenie EVM dlya termodinamicheskikh raschetov metallurgicheskikh protsessov (Application of Computers for Thermodynamic Calculations of Metallurgical Processes), Moscow: Nauka, 1982.
Termicheskie konstanty veshchestv: Spravochnik v 10 tt. (Thermochemical Constants of Substances: A Handbook in Ten Volumes), Glushko, V.P., Ed., Moscow: Akad. Nauk SSSR, 1962–1981.
Molekulyarnye postoyannye neorganicheskikh soedinenii: Spravochnik (Molecular Constants of Inorganic Compounds: A Handbook), Krasnov, K.S., Ed., Leningrad: Khimiya, 1979.
Sidorov, L.P., Denisov, M.Ya., Akishin, P.A., et al., Zh. Fiz. Khim., 1966, Vol. 40, No. 5, pp. 1151–1154.
Hildenbrand, D.L., J. Chem. Phys., 1975, Vol. 62, No. 8, pp. 3074–3079.
Stull, D.R. and Profet, H., JANAF Thermochemical Tables, NSRDS-NBS 37, Washington, D.C.: NBS, 1971.
Malandin, M.B., Lakhotkin, Yu.V., Kuz’min, V.P., et al., Termodinamicheskie i kineticheskie faktory khimicheskogo osazhdeniya tugoplavkikh metallov 5–7 grupp iz gazovoi fazy ikh letuchikh ftoridov i vodoroda (Thermodynamic and Kinetic Factors Responsible for Chemical Vapor-Phase Deposition of Group V–VII Refractory Metals Using Their Volatile Fluorides and Hydrogen), Available from VINITI, Sept. 10, 1987, Moscow, No. 6639.
Arara, R. and Pollard, R., J. Electrochem. Soc., 1991, Vol. 138, No. 5, pp. 1523–1537.
Gusarov, A.V., Pervov, V.S., Gotkis, I.S., et al., Dokl. Akad. Nauk SSSR, 1974, Vol. 216, No. 6, pp. 1296–1299.
Zhidomirov, G.M., Shlyuger, A.L., and Kantorovich, L.N., Sovremennye problemy kvantovoi khimii (Modern Problems of Quantum Chemistry), Leningrad, Nauka, 1987, pp. 224–281.
Lakhotkin, Yu.V., Physicochemical Fundamentals of Deposition of Alloys of Tungsten with V–VII Group Transition Metals Using Mixtures of Their Fluorides with Hydrogen, Doctoral (Chem.) Dissertation, Moscow: Inst. Phys. Chem. Ross. Akad. Nauk, 1995.
Rootsaert, W.I., von Reifen, L.L., and Sachtler, W.M.H., J. Catal., 1962, Vol. 1, No. 5, pp. 416–431.
Chouzhko, R.K., Kirillov, I.V., Golovanov, Yu.N., and Zakharov, A.P., J. Cryst. Growth, 1968, Vols. 3–4, pp. 219–224.
Krasovskii, A.I., Chuzhko, R.K., Tregulov, V.R., and Balakhovskii, O.A., Ftoridnyi protsess polucheniya vol’frama. Fiziko-khimicheskie osnovy. Svoistva metalla (Production of Tungsten via the Fluoride Process: Physicochemical Fundamentals, Properties of Metal), Moscow: Nauka, 1981.
Galkin, N.P., Tumanov, Yu.N., and Butylkin, Yu.P., Termodinamicheskie svoistva neorganicheskikh veshchestv: Spravochnik (Thermodynamic Properties of Inorganic Substances: A Handbook), Moscow: Atomizdat, 1972.
Lakhotkin, Yu.V., Kurilenko, L.N., and Gromov, V.V., Zh. Fiz. Khim., 1998, Vol. 72, No. 3, pp. 441–444.
Bollbach, G. and Blais, J.C., Surf. Sci., 1984, Vol. 137, No. 1, pp. 327–332.
Shustorovich, E., Surf. Sci. Rep., 1986, Vol. 6, No. 1, pp. 1–63.
Chernov, A.A. and Papkov, N.S., Kristallografiya, 1977, Vol. 32, pp. 35–43.
Pauling, L., General Chemistry. An Introduction to Descriptive Chemistry and Modern Chemical Theory, San Francisco: Freeman, 1954; Leningrad: Nauka, 1974; Moscow: Mir, 1985.
Zhdanov, V.P., Elementarnye fiziko-khimicheskie protsessy na poverkhnosti (Elementary Physicochemical Processes of Surfaces), Novosibirsk: Nauka, 1988.
Baxter, R, Exactly Solved Models in Statistical Mechanics, London: Academic, 1982; Moscow: Mir, 1985.
Landau, L.D. and Lifshitz, E.M., Statisticheskaya fizika (Statistical Physics), Moscow: Nauka, 1976; Oxford: Pergamon, 1980).
Einstein, T.L., Crit. Rev. Solid State Mater. Sci, 1978, Vol. 7, pp. 261–288.
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Original Russian Text © Yu.V. Lakhotkin, V.L. Goncharov, 2008, published in Korroziya: Materialy, Zashchita, 2007, No. 5, pp. 1–6.
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Lakhotkin, Y.V., Goncharov, V.L. Equilibrium adsorption of fluorides from the gaseous phase on tungsten single crystals. Prot Met 44, 637–643 (2008). https://doi.org/10.1134/S0033173208070011
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DOI: https://doi.org/10.1134/S0033173208070011