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On the formation of the crystalline phases and nanostructure of silicon carbonitride layers grown on gallium arsenide substrates

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Abstract

The crystallization of thin silicon carbonitride layers obtained by chemical vapor deposition from silicon organic precursors on gallium arsenide substrates at 973 K in the presence of liquid gallium drops is studied. The layers grown by the vapor-liquid-solid method are studied by IR, Raman, and energy dispersive spectroscopy, scanning electron microscopy, and X-ray diffraction using synchrotron radiation in order to determine their chemical and phase composition, crystal structure, and surface morphology. Their morphology is supposed to be associated with the formation of nuclei in a gallium drop located at the surface of the gallium arsenide substrate.

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References

  1. M. G. Mil’vidskii, O. R. Pelevin, and B. A. Sakharov, Physicochemical Principles to Obtain Decomposing Semiconductor Compounds [in Russian], Metallurgiya, Moscow (1974).

    Google Scholar 

  2. E. I. Givargizov, Growth of Thread-like and Plate-like Crystals from Vapor [in Russian], Nauka, Moscow (1977).

    Google Scholar 

  3. W. J. Cheng and X. M. Ma, Sci. China. Ser. E-Tech. Sci., 52, No. 1, 28–31 (2009).

    Article  CAS  Google Scholar 

  4. V. I. Kosyakov and B. M. Kuchumov, Izv. Vyssh. Uchebn. Zaved., Mat. élekt. Tekhn., No. 1, 9–13 (2006).

  5. N. I. Fainer, A. N. Golubenko, Yu. M. Rumyantsev, and E. A. Maksimovskii, Fiz. Khim. Stekla, 35, 351–364 (2009).

    Google Scholar 

  6. N. I. Fainer, M. L. Kosinova, Yu. M. Rumyantsev, and F. A. Kuznetsov, J. Phys. IV, 9, Pr8-769–Pr8-775 (1999).

    Article  Google Scholar 

  7. N. I. Fainer, E. A. Maximovskii, Yu. M. Rumyantsev, M. L. Kosinova, and F. A. Kuznetsov, NIMA, 470, 193–197 (2001).

    Article  CAS  Google Scholar 

  8. JCPDS Int. Center for Diffraction Data, USA (1988), 41, card No. 360.

  9. N. I. Fainer, Yu. M. Rumyantsev, A. N. Golubenko, M. L. Kosinova, and F. A. Kuznetsov, J. Crys. Growth, 248, 175–179 (2003).

    Article  CAS  Google Scholar 

  10. A. C. Ferrari and J. Robertson, Phys. Rev. B, 61, No. 20, 14095–14107 (2000).

    Article  CAS  Google Scholar 

  11. F. Tuinstra and J. L. Koening, J. Chem. Phys., 53, 1126–1130 (1970).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev & E. A. Maximovskii

Authors
  1. N. I. Fainer
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  2. V. I. Kosyakov
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  3. Yu. M. Rumyantsev
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  4. E. A. Maximovskii
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Correspondence to N. I. Fainer.

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Original Russian Text Copyright © 2012 by N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. Maximovskii

Devoted to the Jubilee of Academician F. A. Kuznetsov

__________

Translated from Zhurnal Strukturnoi Khimii, Vol. 53, No. 4, pp. 814–820, July–August, 2012.

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Fainer, N.I., Kosyakov, V.I., Rumyantsev, Y.M. et al. On the formation of the crystalline phases and nanostructure of silicon carbonitride layers grown on gallium arsenide substrates. J Struct Chem 53, 805–811 (2012). https://doi.org/10.1134/S0022476612040270

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  • DOI: https://doi.org/10.1134/S0022476612040270

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