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Structure of HfO2 films and binary oxides on its base

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Abstract

The chemical composition and structure of HfO2 films and binary oxides formed by their doping with aluminum and scandium are analyzed. It is shown that aluminum doping of HfO2 causes film amorphization: at the Al concentration above 30 at.% the film becomes amorphous. Scandium doping of HfO2 modifies the monoclinic structure, and in the Sc concentration range from ∼9 at.% to ∼14 at.% Sc under non-equilibrium conditions of the CVD process at 600°C a solid solution film of the orthorhombic structure forms.

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Authors and Affiliations

  1. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    T. P. Smirnova, L. V. Yakovkina, V. O. Borisov & V. N. Kichai

  2. G. K. Boreskov Institute of Catalysis, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    V. V. Kaichev & V. V. Kriventsov

Authors
  1. T. P. Smirnova
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  2. L. V. Yakovkina
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  3. V. O. Borisov
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  4. V. N. Kichai
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  5. V. V. Kaichev
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  6. V. V. Kriventsov
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Corresponding author

Correspondence to L. V. Yakovkina.

Additional information

Original Russian Text Copyright © 2012 by T. P. Smirnova, L. V. Yakovkina, V. O. Borisov, V. N. Kichai, V. V. Kaichev, V. V. Kriventsov

Devoted to the Jubilee of Academician F. A. Kuznetsov

__________

Translated from Zhurnal Strukturnoi Khimii, Vol. 53, No. 4, pp. 718–724, July–August, 2012.

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Smirnova, T.P., Yakovkina, L.V., Borisov, V.O. et al. Structure of HfO2 films and binary oxides on its base. J Struct Chem 53, 708–714 (2012). https://doi.org/10.1134/S0022476612040130

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  • DOI: https://doi.org/10.1134/S0022476612040130

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