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Stand for Experimentally Studying Local Parameters of Chemically Active Induction Discharge Plasma

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Abstract

An experimental stand for studying the local parameters of a chemically active plasma of an induction discharge maintained at low pressure is described. Taking into account the limitations caused by the peculiarities of working with chemically aggressive media, a method is proposed for changing the spatially localized plasma parameters of the discharge using “fast” electrical probes. Methods for improving the accuracy of probe methods and smoothing the experimental current-voltage characteristics are considered.

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Funding

The study was supported by a grant from the Russian Science Foundation (project no. 20-13-00035).

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Authors and Affiliations

  1. Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia

    S. V. Sintsov, E. I. Preobrazhensky, A. V. Vodopyanov & D. A. Mansfeld

  2. Lobachevsky National Research Nizhny Novgorod State University, 603022, Nizhny Novgorod, Russia

    S. V. Sintsov, E. I. Preobrazhensky & A. V. Vodopyanov

  3. Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences, 603951, Nizhny Novgorod, Russia

    R. A. Kornev

Authors
  1. S. V. Sintsov
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  2. E. I. Preobrazhensky
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  3. R. A. Kornev
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  4. A. V. Vodopyanov
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  5. D. A. Mansfeld
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Correspondence to S. V. Sintsov.

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Sintsov, S.V., Preobrazhensky, E.I., Kornev, R.A. et al. Stand for Experimentally Studying Local Parameters of Chemically Active Induction Discharge Plasma. Instrum Exp Tech 65, 419–425 (2022). https://doi.org/10.1134/S0020441222030058

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