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An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface

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Abstract

An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp1 and sp3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.

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Authors and Affiliations

  1. Joint Institute for High Temperatures, Russian Academy of Sciences, 125412, Moscow, Russia

    A. V. Kostanovskiy, A. A. Pronkin, M. G. Zeodinov & M. E. Kostanovskaya

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  1. A. V. Kostanovskiy
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  2. A. A. Pronkin
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  3. M. G. Zeodinov
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  4. M. E. Kostanovskaya
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Correspondence to A. A. Pronkin.

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Translated by A. Seferov

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Kostanovskiy, A.V., Pronkin, A.A., Zeodinov, M.G. et al. An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface. Instrum Exp Tech 62, 568–572 (2019). https://doi.org/10.1134/S0020441219030205

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  • DOI: https://doi.org/10.1134/S0020441219030205

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