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High-speed vacuum evaporation of large-area targets by a focused electron beam

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Abstract

A method of electron-beam evaporation of a target in a vacuum of ~10–2 Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an angular velocity of 8–80 rad/s by means of a ring sweep in the frequency range of 50–500 Hz. Then, by radial displacement with a linear velocity of 10–100 mm/s, the spot is guided over a spiral path from the edge of the target to its center. Due to spiral scanning, the spot runs across the entire target surface with a much larger area in 0.1–1.0 s and rapidly vaporizes the target.

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Authors and Affiliations

  1. Institute of Physical Materials Science, Siberian Branch, Russian Academy of Sciences, Ulan-Ude, 670047 Republic of Buryatia, Russia

    A. P. Semenov & I. A. Semenova

Authors
  1. A. P. Semenov
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  2. I. A. Semenova
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Correspondence to A. P. Semenov.

Additional information

Original Russian Text © A.P. Semenov, I.A. Semenova, 2017, published in Pribory i Tekhnika Eksperimenta, 2017, No. 3, pp. 145–147.

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Semenov, A.P., Semenova, I.A. High-speed vacuum evaporation of large-area targets by a focused electron beam. Instrum Exp Tech 60, 450–452 (2017). https://doi.org/10.1134/S0020441217030149

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  • DOI: https://doi.org/10.1134/S0020441217030149

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