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Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere

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Abstract

Probe measurements of reactive magnetron-discharge plasma were conducted in order to optimize the operating modes and predict the results of a mid-frequency magnetron sputtering system for depositing Ti–O–N compositions. A method for probe-data processing is developed. This method allows the determination of the basic plasma parameters, such as the concentration and temperature of electrons and ions. In order to reduce the impact of data errors that are due to the proximity of the probe and magnetron-source frequencies, the current–voltage characteristic was measured 50–80 times; these data are interpolated and then averaged.

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References

  1. Vaz, F., Martin, N., and Fenker, M., Metallic Oxinitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications, Netherlands: Bentham Sci., 2013. doi 10.2174/97816080515641130101

    Book  Google Scholar 

  2. Barybin, A.A., Zav’yalov, A.V., and Shapovalov, V.I., Glass Phys. Chem., 2012, vol. 38, no. 4, pp. 396–401.

    Article  Google Scholar 

  3. Kudryavtseva, E.N., Pichugin, V.F., Nikitenkov, N.N., Sypchenko, V.S., Morozova, N.S., Shulepov, I.A., and Dushkin, I.V., J. Surface Investigation. X-ra., Synchrotron, and Neutron Techniques, 2012, vol. 6, no. 4, p. 688. doi 10.1134/S1027451012080113

    Article  Google Scholar 

  4. Pogrebnjak, A.D., Yakushchenko, I.V., Bagdasaryan, A.A., Bondar, O.V., Krause-Rehberg, R., Abadias, G., Chartier, P., Oyoshi, K., Takeda, Y., Beresnev, V.M., and Sobol, O.V., Mater. Chem. Phys., 2014, vol. 147, p. 1079. doi 10.1016/j.matchemphys.2014.06.062

    Article  Google Scholar 

  5. Konishchev, M.E., Evdokimov, K.E., Kuz’min, O.S., Pustovalova, A.A., Morozova, N.S., Surmenev, R.A., Pichugin, V.F., and Apple, M., Izv. Vyssh. Uchebn. Zaved., Fiz., 2013, vol. 56, no. 10, p. 35.

    Google Scholar 

  6. Sarra-Bournet, C., Haberl, B., Charles, C., and Boswell, R., J. Phys. D: Appl. Phys., 2011, vol. 44, p. 455202. doi 10.1088/0022-3727/44/45/455202

    Article  ADS  Google Scholar 

  7. Gago, R., Redondo-Cubero, A., Vinnichenko, M., Lehmann, J., Munnik, F., and Palomares, F.J., Mater. Chem. Phys., 2012, vol. 136, p. 729. doi 10.1016/j.matchemphys.2012.07.049

    Article  Google Scholar 

  8. Windecker, S., Mayer, I., De Pasquale, G., Maier, W., Dirsch, O., De Groot, P., Wu, Y.-P., Noll, G., Leskosek, B., Meier, B., and Hess, O.M., Circulation, 2001, vol. 104, p. 928. doi 10.1161/hc3401.093146

    Article  Google Scholar 

  9. Hench, L. and Jones, J., Biomaterials, Artificial Organs and Tissue Engineering, Woodhead, 2005, P. 286. doi 10.1533/9781845690861.1

    Book  Google Scholar 

  10. Mani, G., Feldman, M.D., Patel, D., and Agrawal, C.M., Biomaterials, 2007, vol. 28, p. 1689. doi 10.1016/j.biomaterials. 2006.11.042

    Article  Google Scholar 

  11. Guérin, P., Rondeau, F., Grimandi, G., Heymann, M.F., Heymann, D., Pillet, P., Al Habash, O., Loirand, G., Pacaud, P., and Crochet, D., J. Vasc. Res., 2004, vol. 41, p. 46. doi 10.1159/000076245

    Article  Google Scholar 

  12. Hill, R., Bagust, A., Bakhai, A., Dickson, R., Dundar, Y., Haycox, A., Mujica, Mota R., Reaney, A., Roberts, D., Williamson, P., and Walley, T., Health Technol. Assess., 2004, vol. 8, no. 35, p. 256. doi 10.3310/hta8350

    Article  Google Scholar 

  13. Zen., Lin., In-Seop, Lee., Yoon-Jeong, Choi., In-Sup, Noh., and Sung-Min, Chung., Biomed. Mater., 2009, vol. 4, p. 015013. doi 10.1088/1748-6041/4/1/ 015013

    Article  ADS  Google Scholar 

  14. Kuzmin, O.S., Kositsin, L.G., Padusenko, A.N., Pokushalov, A.V., Yermolovich, I.M., and Pichugin, V.F., Proc. 9th Int. Conf. Modif. Mater. with Particle Beams and Plasma Flows, Tomsk, 2008, p. 35.

    Google Scholar 

  15. Konishchev, M.E., Kuz’min, O.S., Morozova, N.S., and Pichugin, V.F., Izv. Vyssh. Uchebn. Zaved., Fiz., 2012, vol. 55, no. 11/2, p. 235.

    Google Scholar 

  16. Kusano, E., J. Appl. Phys., 1991, vol. 70, p. 7089. doi 10.1063/1.349791

    Article  ADS  Google Scholar 

  17. Barankova, H., Berg, S., Carlsson, P., and Nender, C., Thin Solid Films, 1995, vol. 260, p. 181. doi 10.1016/ 0040-6090(94)06501-2

    Article  ADS  Google Scholar 

  18. Pinaev, V.V., Extended Abstract of Cand. Sci. (Eng.) Dissertation, St. Petersburg, LETI, 2011, P.243.

    Google Scholar 

  19. Plasma Diagnostic Techniques, Ed. by Huddlestone, R. H. and Leonard, S. L., New York: Academic, 1965; Moscow: Mir, 1967.

  20. Andreev, V.L., Bragin, I.V., and Mikhailov, V.F., Diagnostika plazmy zondami provodimosti: Ucheb. posobie (Plasma Diagnostics by Conductivity Probes. A Tutorial), St. Petersburg: SPbGUAP, 2000.

    Google Scholar 

  21. Lieberman, M.A. and Lichtenberg, A.J., Principles of Plasma Discharges and Materials Processing, New York: Wiley, 2005, p. 757. doi 10.1002/0471724254

    Book  Google Scholar 

  22. Kagan, Yu.M. and Perel’, V.I., Sov. Phys. Usp., 1964, vol. 81, p. 767. doi 10.3367/UFNr.0081.196311a.0409

    Article  ADS  Google Scholar 

  23. Depla, D., Li, X.Y., Mahieu, S., and De Gryse, R., J. Phys. D: Appl. Phys., 2008, vol. 41, p. 202003. doi 10.1088/0022-3727/41/20/202003

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Tomsk Polytechnic University, pr. Lenina 30, Tomsk, 634050, Russia

    K. E. Evdokimov, M. E. Konishchev, S. Chzhilei & V. F. Pichugin

Authors
  1. K. E. Evdokimov
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  2. M. E. Konishchev
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  3. S. Chzhilei
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  4. V. F. Pichugin
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Corresponding author

Correspondence to M. E. Konishchev.

Additional information

Original Russian Text © K.E. Evdokimov, M.E. Konishchev, S. Chzhilei, V.F. Pichugin, 2016, published in Pribory i Tekhnika Eksperimenta, 2016, No. 6, pp. 44–49.

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Evdokimov, K.E., Konishchev, M.E., Chzhilei, S. et al. Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere. Instrum Exp Tech 59, 816–821 (2016). https://doi.org/10.1134/S0020441216050055

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  • DOI: https://doi.org/10.1134/S0020441216050055

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