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A multifunctional contactless profilometer based on a tunable acousto-optical image filter

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Abstract

A contactless complete-field profilometer operating as an optical coherent microscope with the spectral recording is designed. Its special feature is that the spectral selection is carried out in the receiving channel. An acousto-optical image monochromator is used for this purpose. The experimental relief surface data are given.

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Authors and Affiliations

  1. Scientific Technological Center of Unique Instrument-Making, Russian Academy of Sciences, ul. Butlerova 15, Moscow, 117342, Russia

    A. V. Viskovatykh, A. S. Machikhin, V. E. Pozhar & V. I. Pustovoit

Authors
  1. A. V. Viskovatykh
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  2. A. S. Machikhin
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  3. V. E. Pozhar
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  4. V. I. Pustovoit
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Corresponding author

Correspondence to A. V. Viskovatykh.

Additional information

Original Russian Text © A.V. Viskovatykh, A.S. Machikhin, V.E. Pozhar, V.I. Pustovoit, 2015, published in Pribory i Tekhnika Eksperimenta, 2015, No. 1, pp. 117–121.

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Viskovatykh, A.V., Machikhin, A.S., Pozhar, V.E. et al. A multifunctional contactless profilometer based on a tunable acousto-optical image filter. Instrum Exp Tech 58, 114–117 (2015). https://doi.org/10.1134/S0020441215010133

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  • DOI: https://doi.org/10.1134/S0020441215010133

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