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An automated interference microscope for measuring dynamic objects

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Abstract

An automated interference microscope based on the phase-shifting method in a dynamic mode with continuous motion of the reference mirror is described. The microscope is intended for measuring the height of the profile of reflecting nonstationary in time (dynamic) objects with an accuracy of up to 0.3 nm and dynamic processes in living cells with a frequency of phase images of up to 30 Hz.

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Authors and Affiliations

  1. Research Institute of Optico-Physical Measurements, ul. Ozernaya 46, Moscow, 119361, Russia

    G. G. Levin, G. N. Vishnyakov & V. L. Minaev

Authors
  1. G. G. Levin
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  2. G. N. Vishnyakov
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  3. V. L. Minaev
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Correspondence to G. G. Levin.

Additional information

Original Russian Text © G.G. Levin, G.N. Vishnyakov, V.L. Minaev, 2014, published in Pribory i Tekhnika Eksperimenta, 2014, No. 1, pp. 79–84.

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Levin, G.G., Vishnyakov, G.N. & Minaev, V.L. An automated interference microscope for measuring dynamic objects. Instrum Exp Tech 56, 686–690 (2013). https://doi.org/10.1134/S0020441214010060

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  • DOI: https://doi.org/10.1134/S0020441214010060

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