Skip to main content
SpringerLink
Log in

Gas discharge source of metal vapor and fast gas atoms

  • Laboratory Techniques
  • Published:
Instruments and Experimental Techniques Aims and scope Submit manuscript

Abstract

A source of metal atom flow coinciding in time and space with a flow of fast gas atoms has been studied and the study results are presented. The fast particles are produced due to charge exchange collisions of ions accelerated by potential difference between a plasma emitter inside the source and secondary plasma inside a process vacuum chamber. The emitter is the glow discharge plasma, whose electrons are confined in an electrostatic trap formed by a cold hollow cathode and an emissive grid the latter being negative both to the cathode and the chamber. The metal atoms are produced due to sputtering a target placed at the hollow cathode bottom by ions from the plasma emitter with energy up to 3 keV. Sputtered atoms cross the emitter, together with accelerated ions enter the chamber through the emissive grid and deposit on pieces placed therein. When a mixture of argon and nitrogen is used, the metal nitride coatings are being synthesized and interruptedly bombarded during the synthesis by atoms and molecules with energy variable from ∼10 to ∼300 eV.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Metel, A.S., Grigoriev, S.N., Melnik, Yu.A., and Prudnikov, V.V., Plasma Phys. Rep., 2011, vol. 37, p. 628.

    Article  ADS  Google Scholar 

  2. Handbook of Plasma Immersion Ion Implantation and Deposition, Anders, A., Ed., New York: Wiley, 2000.

    Google Scholar 

  3. Metel, A., Surf. Coat. Technol., 2002, vol. 156, nos. 1/3, p. 38.

    Article  Google Scholar 

  4. Gavrilov, N.V., Mesyats, G.A., Radkovskii, G.V., and Bersenev, V.V., Surf. Coat. Technol., 1997, vol. 96, no. 1, p. 81.

    Article  Google Scholar 

  5. Metel, A.S., and Grigoriev, S.N., US Patent, no. 6285025, 2001.

  6. Metel, A.S., Plasma Phys. Rep., 2012, vol. 38, p. 254.

    Article  ADS  Google Scholar 

  7. Grigoriev, S., Melnik, Yu., and Metel, A., Surf. Coat. Technol., 2002, vol. 156, nos. 1/3, p. 44.

    Article  Google Scholar 

  8. Grigoriev, S.N., Melnik, Yu.A., Metel, A.S., and Panin, V.V., Instrum. Exper. Techn., 2009, vol. 52, p. 602.

    Article  Google Scholar 

  9. Grigoriev, S.N., Melnik, Yu.A., Metel, A.S., and Panin, V.V., Instrum. Exper. Techn., 2009, vol. 52, p. 731.

    Article  Google Scholar 

  10. Metel, A.S., Sov. Phys. Tech. Phys., 1986, vol. 31, p. 1395.

    Google Scholar 

  11. Metel, A.S., Sov. Phys. Tech. Phys., 1985, vol. 30, p. 1133.

    ADS  Google Scholar 

  12. Metel, A.S., Grigoriev, S.N., Melnik, Yu.A., and Panin, V.V., Plasma Phys. Rep., 2009, vol. 35, p. 1058.

    Article  ADS  Google Scholar 

  13. Metel, A.S., and Grigoriev, S.N., Tleyushchii razryad s elektrostaticheskim uderzhaniem elektronov: fizika, tekhnika, primeneniya (Glow Discharge with Electrostatic Electron Confinement: Physics, Technique, Applications), Moscow: Yanus-K, 2005.

    Google Scholar 

  14. Metel, A.S., Grigoriev, S.N., Melnik, Yu.A., and Bolbukov, V.P., Instrum. Exper. Techn., 2012, vol. 55, p. 122.

    Article  Google Scholar 

  15. Metel, A., Melnik, Yu., Panin, V., and Prudnikov V., Plasma Phys. Rep., 2011, vol. 37, p. 357.

    Article  ADS  Google Scholar 

  16. Metel, A.S., Grigoriev, S.N., Melnik, Yu.A., and Panin, V., Jpn. J. Appl. Phys., 2011, vol. 50, p. 08JG04.

    Article  Google Scholar 

  17. Rossnagel, S.M., IEEE Trans. Plasma Sci., 1990, vol. 18, p. 878.

    Article  ADS  Google Scholar 

  18. Timanyuk, V.A., Tkachenko, V.M., and Tyutyunnik, V.B., Vestn. Kharkov. Univ., 1979, no. 180, p. 105.

    Google Scholar 

  19. Vizir, A.V., Oks, E.M., Shchanin, P.M., and Yushkov, G.Yu., Techn. Phys., 1997, vol. 42, p. 611.

    Article  ADS  Google Scholar 

  20. Grigoriev, S.N., Melnik, Yu.A., and Metel, A.S., Inzhen. Fiz., 2005, no. 3, p. 23.

    Google Scholar 

  21. Metel, A.S., Grigoriev, S.N., Melnik, Yu.A., and Bolbukov, V.P., Instum. Exper. Techn., 2012, vol. 55, p. 288.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Moscow State University of Technology “Stankin,”, Vadkovskii per. 3a, Moscow, 127994, Russia

    S. N. Grigoriev, Yu. A. Melnik & A. S. Metel

Authors
  1. S. N. Grigoriev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yu. A. Melnik
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. S. Metel
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. S. Metel.

Additional information

Original Russian Text © S.N. Grigoriev, Yu.A. Melnik, A.S. Metel, 2013, published in Pribory i Tekhnika Eksperimenta, 2013, No. 3, pp. 121–127.

The article was translated by the authors.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Grigoriev, S.N., Melnik, Y.A. & Metel, A.S. Gas discharge source of metal vapor and fast gas atoms. Instrum Exp Tech 56, 358–364 (2013). https://doi.org/10.1134/S0020441213030044

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020441213030044

Keywords

Search

Navigation