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Background subtraction practice in X-ray reflectivity reciprocal space mapping and its influence on the structural parameters of thin films

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Abstract

Background subtraction practice in X-ray reflectivity reciprocal space mapping (XRRSM) is described and compared to the traditional specular reflectivity. XRRSM allows determining a more precise contribution of background to the reflectivity signal which manifests itself in an improvement of the resolution of interference fringes. Data analysis and influence of background subtraction determined by two methods on the structural parameters of thin film are discussed using simulated X-ray reflectivity.

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Authors and Affiliations

  1. Laboratoire Physico-chimie des Matériaux, Unité de Service Commun de Recherche “High resolution X-ray diffractometer”, Département de Physique, Université de Monastir, Faculté des Sciences de Monastir, Avenue de l’Environnement, 5019, Monastir, Tunisia

    A. Fouzri, F. Salah, N. Mtiraoui, B. Harzallah & M. Oumezzine

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  1. A. Fouzri
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  2. F. Salah
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  3. N. Mtiraoui
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  4. B. Harzallah
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  5. M. Oumezzine
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Correspondence to A. Fouzri.

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Fouzri, A., Salah, F., Mtiraoui, N. et al. Background subtraction practice in X-ray reflectivity reciprocal space mapping and its influence on the structural parameters of thin films. Instrum Exp Tech 55, 96–103 (2012). https://doi.org/10.1134/S0020441211060248

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  • DOI: https://doi.org/10.1134/S0020441211060248

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