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Production of probes with carbon nanotubes

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Abstract

A method for producing carbon nanotubes by magnetron sputtering of a carbon target is proposed. It allows modification of traditional probes for probe microscopy using carbon nanotubes, thus substantially improving their characteristics. Probes with nanotubes with a tip radius of rounding of several nanometers can be used for precise scanning, quality control of samples, and nanolithography.

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Authors and Affiliations

  1. National Research Nuclear University MEPhI, Kashirskoe sh. 31, Moscow, 115409, Russia

    S. V. Antonenko & O. S. Malinovskaya

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  1. S. V. Antonenko
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  2. O. S. Malinovskaya
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Correspondence to S. V. Antonenko.

Additional information

Original Russian Text © S.V. Antonenko, O.S. Malinovskaya, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 6, pp. 139–142.

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Antonenko, S.V., Malinovskaya, O.S. Production of probes with carbon nanotubes. Instrum Exp Tech 53, 903–905 (2010). https://doi.org/10.1134/S0020441210060266

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  • DOI: https://doi.org/10.1134/S0020441210060266

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