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Precision processing of CVD diamond plates by Cu-laser irradiation

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Abstract

The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose irradiation can be focused to a small spot and also used for the intensification of the image brightness in an optical system, which is able to process ∼106 points of an object for one (∼10 ns) or a few pulses. The characteristics of processed surfaces of polycrystalline diamond films and plates are given.

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Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russia

    R. O. Buzhinskii, A. V. Vlasov, V. G. Ral’chenko & V. V. Savranskii

  2. Lebedev Physics Institute, Russian Academy of Sciences, Leninskii pr. 53, Moscow, 119991, Russia

    K. I. Zemskov & A. A. Isaev

Authors
  1. R. O. Buzhinskii
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  2. K. I. Zemskov
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  3. A. A. Isaev
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  4. A. V. Vlasov
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  5. V. G. Ral’chenko
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  6. V. V. Savranskii
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Corresponding author

Correspondence to V. V. Savranskii.

Additional information

Original Russian Text © R.O. Buzhinskii, K.I. Zemskov, A.A. Isaev, A.V. Vlasov, V.G. Ral’chenko, V.V. Savranskii, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 2, pp. 156–159.

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Buzhinskii, R.O., Zemskov, K.I., Isaev, A.A. et al. Precision processing of CVD diamond plates by Cu-laser irradiation. Instrum Exp Tech 53, 301–304 (2010). https://doi.org/10.1134/S0020441210020272

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  • DOI: https://doi.org/10.1134/S0020441210020272

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