Abstract
The design of a microwave source in which a discharge is initiated by an electromagnetic surface wave at 2.45 GHz is described. A stable discharge was supported at a gas pressure p 0 exceeding the atmospheric pressure in He, N2, and in H2-Ar, H2-He, and O2-He mixtures in a 2-mm inner diameter quartz tube with a 0.15-mm diameter nozzle at a 50- to 115-W microwave power. A degree of dissociation of up to 80% was reached for pure H2 at p 0 = 6 Torr and a 6% mixture of H2 and He at p 0 = 50 Torr. When p 0 increases to 19 Torr for H2 and to 300 Torr for the mixture, the hydrogen-atom beam intensity, in spite of a decrease in the degree of dissociation, increases due to narrowing of the beam particle velocity distribution.
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Miller, D.R. and Patch, D.F., Rev. Sci. Instrum., 1969, vol. 54, p. 1566.
Gorry, P.A. and Grice, R., J. Phys. E: Sci. Instrum, 1979, vol. 12, p. 857.
Sibener, S.J., Buss, R.J., Ng C. Yiu, and Lee Yu.T., Rev. Sci. Instrum., 1980, vol. 51, p. 167.
Wilsch, H., J. Chem. Phys., 1972, vol. 56, no. 3, p. 1412.
Silvera, I.F. and Walraven, J.T.M., Phys. Lett., 1979, vol. 74A, p. 193.
Hershcovitch, A., Kronou, A., and Niinikoski, T.O., Rev. Sci. Instrum., 1987, vol. 58, no. 4, p. 547.
Ding, A., Karlau, J., and Weise, J., Rev. Sci. Instrum., 1977, vol. 48, no. 8, p. 1002.
Sleven, J. and Stirling, W., Rev. Sci. Instrum., 1981, vol. 52, no. 12, p. 1780.
Moison, M., Zakrzewski, Z., and Pantel, R., J. Phys. D: Appl. Phys., 1979, vol. 12, p. 219.
Moison, M. and Zakrzewski, Z., J. Phys. D: Appl. Phys., 1991, vol. 24, p. 1025.
Boisse-Laporte, C., Granier, A., Dervisevic, E., et al., J. Phys. D: Appl. Phys., 1987, vol. 20, p. 197.
Daviaud, S., Boisse-Laporte, C., Leprince, P., and Marec, J., J. Phys. D: Appl. Phys., 1989, vol. 22, p. 770.
Granier, A., Pasquiers, S., Boisse-Laporte, C., et al., J. Phys. D: Appl. Phys., 1989, vol. 22, p. 1487.
Granier, A., Chereau, D., Henda, K., et al., J. Appl. Phys., 1994, vol. 75, p. 64.
Chave, C., Boisse-Laporte, C., Marec, J., and Leprince, P., Mater. Sci. Eng. A, 1991, vol. 140, p. 494.
Ricard, A., Barbeau, C., Besner, A., et al., Can. J. Phys., 1988, vol. 66, p. 740.
Rousseau, A., Granier, A., Gousset, G., and Leprince, P., J. Phys. D: Appl. Phys., 1994, vol. 27, p. 1412.
Tomasini, L., Rousseau, A., Gousset, G., and Leprince, P., J. Phys. D: Appl. Phys., 1996, vol. 29, p. 1006.
Granier, A., Microwave Discharges: Fundamentals and Applications, Ferreira, C.M., Ed., New York: Plenum, 1993, p. 491.
Ricard, A., Besner, A., Hubert, J., and Moison, M., J.Phys. B: At. Mol. Opt. Phys., 1988, vol. 21, p. L579.
Callede, G., Deschamps, J., Godart, J.L., and Ricard, A., J. Phys. D: Appl. Phys., 1991, vol. 24, p. 909.
Selby, M. and Hieftje, G.M., Spectrochim. Acta B, 1987, vol. 42, p. 285.
Koch, N. and Steffens, E., Rev. Sci. Instrum., 1998, vol. 70, p. 1631.
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Original Russian Text © V.M. Akimov, G. Witte, L.I. Kolesnikova, L.Yu. Rusin, J.P. Toennies, 2009, published in Pribory i Tekhnika Eksperimenta, 2009, No. 3, pp. 91–97.
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Akimov, V.M., Witte, G., Kolesnikova, L.I. et al. A microwave discharge source operating at pressures of several atmospheres. Instrum Exp Tech 52, 394–399 (2009). https://doi.org/10.1134/S0020441209030166
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DOI: https://doi.org/10.1134/S0020441209030166