Abstract
The influence of an ion beam injected along the axis of the anode electrode of a planar magnetron on the initiation of an anomalous low-pressure glow discharge in a magnetron has been considered. The characteristics of the discharge ignition at pressures <8 × 10−2 Pa and the properties of a planar magnetron with an ion-beam-irradiated cathode are determined. It is established that the discharge ignition voltage decreases with an increase in the ion energy and exhibits a threshold behavior as a function of the ion-beam current. It is shown that there is a prospect for extending the functional capabilities of planar magnetrons through matching of the modes of sputtering of the magnetron anode and cathode by an ion beam and plasma ions of an anomalous glow discharge, respectively.
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Original Russian Text © A.P. Semenov, I.A. Semenova, 2009, published in Pribory i Tekhnika Eksperimenta, 2009, No. 1, pp. 110–114.
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Semenov, A.P., Semenova, I.A. Decrease in the ignition pressure of anomalous glow discharge in a magnetron with an ion-beam-irradiated cathode. Instrum Exp Tech 52, 99–103 (2009). https://doi.org/10.1134/S0020441209010151
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DOI: https://doi.org/10.1134/S0020441209010151