Skip to main content
SpringerLink
Log in

Growth of ultrathin Nb2O5 films on quartz substrates

  • Published:
Inorganic Materials Aims and scope

Abstract

Niobium oxide films have been grown by reactive rf sputtering in a vacuum system and characterized by absorption spectroscopy and X-ray diffraction. The thickness of the (optically transparent) films has been determined as a function of sputtering time by examining interference effects in a plane-parallel layer. The average deposition rate is determined to be 7.4 ± 0.3 Å/min (95% confidence interval).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Hallbauer, A., Huber, D., Klauser, F., et al., Optical and Structural Characteristics of Ion-Plated Nb2O5 and HfO2 Films, Plasma Process. Polym., 2007, vol. 4, pp. S53–S58.

    Article  Google Scholar 

  2. Wachs, I.E., Recent Conceptual Advances in the Catalysis Science of Mixed Metal Oxide Catalytic Materials, Catal. Today, 2005, vol. 100, pp. 79–94.

    Article  CAS  Google Scholar 

  3. Starr, D.E., Mendes, F.M.T., Middeke, J., et al., Preparation and Characterization of Well-Ordered, Thin Niobia Films on a Metal Substrate, Surf. Sci., 2005, vol. 599, pp. 14–26.

    Article  CAS  Google Scholar 

  4. Filho, D. de A.B., Franco, D.W., Filho, P.P.A., and Alves, O.L., Niobia Films: Surface Morphology, Surface Analysis, Photoelectrochemical Properties and Crystallization Process, J. Mater. Sci., 1998, vol. 33, pp. 2607–2616.

    Article  Google Scholar 

  5. Avellaneda, C.O., Pawlicka, A., and Aegerter, M.A., Two Methods of Obtaining Sol-Gel Nb2O5 Thin Films for Electrochromic Devices, J. Mater. Sci., 1998, vol. 33, pp. 2181–2185.

    Article  CAS  Google Scholar 

  6. Pawlicka, A., Atik, M., and Aegerter, M.A., Synthesis of Multicolor Coatings for Electrochromic Devices, Thin Solid Films, 1997, vol. 301, nos. 1–2, pp. 236–241.

    Article  CAS  Google Scholar 

  7. Da Costa, E., Avellaneda, C.O., and Pawlicka, A., Alternative Nb2O5-TiO2 Thin Films for Electrochromic Devices, J. Mater. Sci., 2001, vol. 36, pp. 1407–1410.

    Article  Google Scholar 

  8. De Sá, A.I., Rangel, C.M., Skeldon, P., and Thompson, G.E., Semiconductive Properties of Anodic Niobium Oxides, Port. Electrochim. Acta, 2006, vol. 24, pp. 305–311.

    Article  Google Scholar 

  9. Logacheva, V.A., Divakova, N.A., Tikhonova, Yu.A., et al., Growth of Niobium Oxide Films on Single-Crystal Silicon, Neorg. Mater., 2007, vol. 43, no. 11, pp. 1366–1371 [Inorg. Mater. (Engl. Transl.), vol. 43, no. 11, pp. 1230–1234].

    Article  Google Scholar 

  10. Nagibina, N.B., Interferentsiya i difraktsiya sveta (Interference and Diffraction of Light), Leningrad: Mashinostroenie, 1985.

    Google Scholar 

  11. Sullivan, B.T., Clarke, G.A., Akiyama, T., et al., High-Rate Automated Deposition System for the Manufacture of Complex Multilayer Coatings, Appl. Opt., 2000, vol. 39, no. 1, pp. 157–167.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Voronezh State University, Universitetskaya pl. 1, Voronezh, 394006, Russia

    S. V. Zaitsev, Yu. V. Gerasimenko, S. N. Saltykov, D. A. Khoviv & A. M. Khoviv

Authors
  1. S. V. Zaitsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yu. V. Gerasimenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. N. Saltykov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. A. Khoviv
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. M. Khoviv
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. V. Zaitsev.

Additional information

Original Russian Text © S.V. Zaitsev, Yu.V. Gerasimenko, S.N. Saltykov, D.A. Khoviv, A.M. Khoviv, 2011, published in Neorganicheskie Materialy, 2011, Vol. 47, No. 4, pp. 468–472.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zaitsev, S.V., Gerasimenko, Y.V., Saltykov, S.N. et al. Growth of ultrathin Nb2O5 films on quartz substrates. Inorg Mater 47, 412–416 (2011). https://doi.org/10.1134/S0020168511040224

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020168511040224

Keywords

Search

Navigation