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Temperature-dependent activation energy for silicon desorption processes

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Inorganic Materials Aims and scope

Abstract

A theoretical analysis is presented of the temperature dependence of the activation energy for thermal desorption of silicon from textured tantalum tape. The curves derived from experimental data for the initial stages of desorption are in qualitative agreement with calculation results, which makes it possible to estimate lateral interaction forces and the adatom-substrate interaction energy as a function of surface coverage and to predict structural changes in the film.

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References

  1. Lebedev, V.I. and Mizina, V.V., A Quantum Model for the Growth of Films on Substrates, Nauchnye trudy V mezhdunarodnoi nauchnoi ronferentsii “Khimiya tverdogo tela i sovremennye mikro-i nanotekhnologii” (Proc. V Int. Conf. Solid-State Chemistry and Advanced Micro-and Nanotechnologies), Kislovodsk, 2005, pp. 201–202.

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Authors and Affiliations

  1. North Caucasus State Technical University, pr. Kulakova 2, Stavropol, 355029, Russia

    V. I. Lebedev & V. V. Mizina

  2. South Russia State Technical University, ul. Prosveshcheniya 132, Novocherkassk, Rostov oblast, 346430, Russia

    L. V. Blagina

  3. Southern Scientific Center, Russian Academy of Sciences, ul. Chekhova 41, Rostov-on-Don, 344006, Russia

    A. A. Barannik

Authors
  1. V. I. Lebedev
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  2. V. V. Mizina
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  3. L. V. Blagina
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  4. A. A. Barannik
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Corresponding author

Correspondence to V. I. Lebedev.

Additional information

Original Russian Text © V.I. Lebedev, V.V. Mizina, L.V. Blagina, A.A. Barannik, 2008, published in Neorganicheskie Materialy, 2008, Vol. 44, No. 5, pp. 524–527.

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Lebedev, V.I., Mizina, V.V., Blagina, L.V. et al. Temperature-dependent activation energy for silicon desorption processes. Inorg Mater 44, 450–452 (2008). https://doi.org/10.1134/S0020168508050026

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  • DOI: https://doi.org/10.1134/S0020168508050026

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